diff --git a/Modules/ThirdParty/HDF5/UpdateFromUpstream.sh b/Modules/ThirdParty/HDF5/UpdateFromUpstream.sh
index 79068417a8e..7fea83a8a3f 100755
--- a/Modules/ThirdParty/HDF5/UpdateFromUpstream.sh
+++ b/Modules/ThirdParty/HDF5/UpdateFromUpstream.sh
@@ -39,7 +39,8 @@ readonly paths="
 extract_source () {
     git_archive
     pushd "$extractdir/$name-reduced"
-    sed -i '1 s| /bin/sh|/bin/sh|' c++/src/h5c++.in config/cmake/libh5cc.in
+    sed -i.bak -e '1 s| /bin/sh|/bin/sh|' c++/src/h5c++.in config/cmake/libh5cc.in
+    rm c++/src/h5c++.in.bak config/cmake/libh5cc.in.bak
     chmod a+x c++/src/h5c++.in config/cmake/libh5cc.in
     chmod a-x README.txt
     chmod a-x config/cmake/CTestScript.cmake
diff --git a/Modules/ThirdParty/KWSys/UpdateFromUpstream.sh b/Modules/ThirdParty/KWSys/UpdateFromUpstream.sh
index 1794b04bea9..9842327b6d4 100755
--- a/Modules/ThirdParty/KWSys/UpdateFromUpstream.sh
+++ b/Modules/ThirdParty/KWSys/UpdateFromUpstream.sh
@@ -15,7 +15,8 @@ readonly paths="
 
 extract_source () {
     git_archive
-    sed -i -e '/import off/,/import on/d' "$extractdir/$name-reduced/.gitattributes"
+    sed -i.bak -e '/import off/,/import on/d' "$extractdir/$name-reduced/.gitattributes"
+    rm "$extractdir/$name-reduced/.gitattributes.bak"
 }
 
 . "${BASH_SOURCE%/*}/../../../Utilities/Maintenance/update-third-party.bash"
diff --git a/Utilities/Maintenance/UpdateRequiredITKVersionInRemoteModules.sh b/Utilities/Maintenance/UpdateRequiredITKVersionInRemoteModules.sh
index bf0310893bd..f057b368594 100755
--- a/Utilities/Maintenance/UpdateRequiredITKVersionInRemoteModules.sh
+++ b/Utilities/Maintenance/UpdateRequiredITKVersionInRemoteModules.sh
@@ -82,7 +82,8 @@ current_git_str=($(grep $git_tag_label $azure_pipelines_ci_filename))
 current_git_tag=${current_git_str[1]}
 
 # Sed the latest ITK git tag in the Azure pipelines config file
-sed -i "s/${git_tag_label}${current_git_tag}/${git_tag_label}${latest_git_tag}/g" $azure_pipelines_ci_filename
+sed -i.bak -e "s/${git_tag_label}${current_git_tag}/${git_tag_label}${latest_git_tag}/g" $azure_pipelines_ci_filename
+rm "${azure_pipelines_ci_filename}.bak"
 
 
 # Get the latest ITK Python git tag
@@ -98,7 +99,8 @@ current_git_str=($(grep $python_git_tag_label $azure_pipelines_ci_filename))
 current_git_tag=${current_git_str[1]}
 
 # Sed the latest ITK git tag in the Azure pipelines config file
-sed -i "s/${python_git_tag_label}${current_git_tag}/${python_git_tag_label}${latest_git_tag}/g" $azure_pipelines_ci_filename
+sed -i.bak -e "s/${python_git_tag_label}${current_git_tag}/${python_git_tag_label}${latest_git_tag}/g" $azure_pipelines_ci_filename
+rm "${azure_pipelines_ci_filename}.bak"
 
 # Python setup file
 
@@ -115,7 +117,8 @@ git_install_req_tag_arr=($(echo $git_install_req_tag | tr "=" " "))
 current_git_tag=${git_install_req_tag_arr[-1]}
 
 # Sed the latest ITK git tag in the Python setup file
-sed -i "s/${current_git_tag}/${latest_git_tag}'/g" $python_setup_filename
+sed -i.bak -e "s/${current_git_tag}/${latest_git_tag}'/g" $python_setup_filename
+rm "${python_setup_filename}.bak"
 
 pckg_version_label='version'
 
@@ -139,4 +142,5 @@ new_pckg_patch_version=$((pckg_patch_version + 1))
 # Update to a new major version
 new_pckg_version="${pckg_version_tag_str::-2}${new_pckg_patch_version}'"
 
-sed -i "s/${pckg_version_tag_str}/${new_pckg_version}/g" $python_setup_filename
+sed -i.bak -e "s/${pckg_version_tag_str}/${new_pckg_version}/g" $python_setup_filename
+rm "${python_setup_filename}.bak"