diff --git a/CMakeLists.txt b/CMakeLists.txt
index 6ea4185e4..fc3cb0045 100644
--- a/CMakeLists.txt
+++ b/CMakeLists.txt
@@ -145,6 +145,7 @@ IF ((CMAKE_SIZEOF_VOID_P EQUAL 8) AND
         lib/fusion.c
         t/fusion.c)
     SET_TARGET_PROPERTIES(test-fusion.t PROPERTIES COMPILE_FLAGS "-mavx2 -maes -mpclmul")
+    ADD_DEPENDENCIES(test-fusion.t generate-picotls-probes)
     SET(TEST_EXES ${TEST_EXES} test-fusion.t)
 ENDIF ()
 
diff --git a/cmake/dtrace-utils.cmake b/cmake/dtrace-utils.cmake
index da566461f..191953174 100644
--- a/cmake/dtrace-utils.cmake
+++ b/cmake/dtrace-utils.cmake
@@ -27,10 +27,14 @@ FUNCTION (DEFINE_DTRACE_DEPENDENCIES d_file prefix)
         OUTPUT ${CMAKE_CURRENT_BINARY_DIR}/${prefix}-probes.h
         COMMAND dtrace -o ${CMAKE_CURRENT_BINARY_DIR}/${prefix}-probes.h -s ${d_file} -h
         DEPENDS ${d_file})
+    ADD_CUSTOM_TARGET(generate-${prefix}-probes DEPENDS ${CMAKE_CURRENT_BINARY_DIR}/${prefix}-probes.h)
+    SET_SOURCE_FILES_PROPERTIES(${CMAKE_CURRENT_BINARY_DIR}/${prefix}-probes.h PROPERTIES GENERATED TRUE)
     IF (DTRACE_USES_OBJFILE)
         ADD_CUSTOM_COMMAND(
             OUTPUT ${CMAKE_CURRENT_BINARY_DIR}/${prefix}-probes.o
             COMMAND dtrace -o ${CMAKE_CURRENT_BINARY_DIR}/${prefix}-probes.o -s ${d_file} -G
             DEPENDS ${d_file})
+        ADD_DEPENDENCIES(generate-${prefix}-probes ${CMAKE_CURRENT_BINARY_DIR}/${prefix}-probes.o)
+        SET_SOURCE_FILES_PROPERTIES(${CMAKE_CURRENT_BINARY_DIR}/${prefix}-probes.o PROPERTIES GENERATED TRUE)
     ENDIF ()
 ENDFUNCTION ()