diff --git a/common.mk b/common.mk
index 7f2a1f5040..c62743e046 100644
--- a/common.mk
+++ b/common.mk
@@ -182,6 +182,7 @@ endif
 	if [ $(SFC_LEVEL) = low ]; then jq -s '[.[][]]' $(EXTRA_ANNO_FILE) $(SFC_EXTRA_ANNO_FILE) > $(FINAL_ANNO_FILE); fi
 	if [ $(SFC_LEVEL) = none ]; then cat $(EXTRA_ANNO_FILE) > $(FINAL_ANNO_FILE); fi
 
+$(SFC_MFC_TARGETS) &: private TMP_DIR := $(shell mktemp -d -t cy-XXXXXXXX)
 $(SFC_MFC_TARGETS) &: $(FIRRTL_FILE) $(FINAL_ANNO_FILE) $(VLOG_SOURCES) $(SFC_LEVEL) $(EXTRA_FIRRTL_OPTIONS)
 	rm -rf $(GEN_COLLATERAL_DIR)
 	$(call run_scala_main,tapeout,barstools.tapeout.transforms.GenerateModelStageMain,\
@@ -196,9 +197,9 @@ $(SFC_MFC_TARGETS) &: $(FIRRTL_FILE) $(FINAL_ANNO_FILE) $(VLOG_SOURCES) $(SFC_LE
 		-X $(SFC_LEVEL) \
 		$(EXTRA_FIRRTL_OPTIONS))
 	-mv $(SFC_FIRRTL_BASENAME).lo.fir $(SFC_FIRRTL_FILE) # Optionally change file type when SFC generates LowFIRRTL
-	@if [ $(SFC_LEVEL) = low ]; then cat $(SFC_ANNO_FILE) | jq 'del(.[] | select(.target | test("io.cpu"))?)' > /tmp/unnec-anno-deleted.sfc.anno.json; fi
-	@if [ $(SFC_LEVEL) = low ]; then cat /tmp/unnec-anno-deleted.sfc.anno.json | jq 'del(.[] | select(.class | test("SRAMAnnotation"))?)' > /tmp/unnec-anno-deleted2.sfc.anno.json; fi
-	@if [ $(SFC_LEVEL) = low ]; then cat /tmp/unnec-anno-deleted2.sfc.anno.json > $(SFC_ANNO_FILE) && rm /tmp/unnec-anno-deleted.sfc.anno.json && rm /tmp/unnec-anno-deleted2.sfc.anno.json; fi
+	@if [ $(SFC_LEVEL) = low ]; then cat $(SFC_ANNO_FILE) | jq 'del(.[] | select(.target | test("io.cpu"))?)' > $(TMP_DIR)/unnec-anno-deleted.sfc.anno.json; fi
+	@if [ $(SFC_LEVEL) = low ]; then cat $(TMP_DIR)/unnec-anno-deleted.sfc.anno.json | jq 'del(.[] | select(.class | test("SRAMAnnotation"))?)' > $(TMP_DIR)/unnec-anno-deleted2.sfc.anno.json; fi
+	@if [ $(SFC_LEVEL) = low ]; then cat $(TMP_DIR)/unnec-anno-deleted2.sfc.anno.json > $(SFC_ANNO_FILE) && rm $(TMP_DIR)/unnec-anno-deleted.sfc.anno.json && rm $(TMP_DIR)/unnec-anno-deleted2.sfc.anno.json; fi
 	firtool \
 		--format=fir \
 		--dedup \
diff --git a/scripts/check-tracegen.sh b/scripts/check-tracegen.sh
index e2974fb11c..c30447ee21 100755
--- a/scripts/check-tracegen.sh
+++ b/scripts/check-tracegen.sh
@@ -6,25 +6,26 @@ SCRIPT_DIR=$(dirname $0)
 AXE_DIR=$(realpath ${SCRIPT_DIR}/../tools/axe)
 ROCKET_DIR=$(realpath ${SCRIPT_DIR}/../generators/rocket-chip)
 
+TMP_DIR=$(mktemp -d -t tracegen-XXXXXXXX)
 TO_AXE=${ROCKET_DIR}/scripts/toaxe.py
-TO_AXE_PY3=/tmp/toaxe.py
+TO_AXE_PY3=${TMP_DIR}/toaxe.py
 AXE=${AXE_DIR}/src/axe
 AXE_SHRINK=${AXE_DIR}/src/axe-shrink.py
-AXE_SHRINK_PY3=/tmp/axe-shrink.py
+AXE_SHRINK_PY3=${TMP_DIR}/axe-shrink.py
 
 # TODO: convert scripts to py3 in src
-2to3 $TO_AXE -o /tmp -n -w
+2to3 $TO_AXE -o ${TMP_DIR} -n -w
 sed -i '30d' $TO_AXE_PY3 # remove import sets
-2to3 $AXE_SHRINK -o /tmp -n -w
+2to3 $AXE_SHRINK -o ${TMP_DIR} -n -w
 
 PATH=$PATH:${AXE_DIR}/src
 
-grep '.*:.*#.*@' $1 > /tmp/clean-trace.txt
-python "$TO_AXE_PY3" /tmp/clean-trace.txt > /tmp/trace.axe
-result=$("$AXE" check wmo /tmp/trace.axe)
+grep '.*:.*#.*@' $1 > ${TMP_DIR}/clean-trace.txt
+python "$TO_AXE_PY3" ${TMP_DIR}/clean-trace.txt > ${TMP_DIR}/trace.axe
+result=$("$AXE" check wmo ${TMP_DIR}/trace.axe)
 
 if [ "$result" != OK ]; then
-    "$AXE_SHRINK_PY3" wmo /tmp/trace.axe
+    "$AXE_SHRINK_PY3" wmo ${TMP_DIR}/trace.axe
 else
     echo OK
 fi