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docs/source/Tutorials/stacked_trapezoid_simulation_and_fitting.ipynb
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Indices and tables | ||
================== | ||
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* :ref:`genindex` | ||
* :ref:`modindex` | ||
* :ref:`search` | ||
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@article{sunday2015, | ||
author = {Sunday, Daniel and List, Scott and Chawla, Jasmeet and Kline, R.}, | ||
year = {2015}, | ||
month = {10}, | ||
pages = {}, | ||
title = {Determining the shape and periodicity of nanostructures using small-angle X-ray scattering}, | ||
volume = {48}, | ||
journal = {Journal of Applied Crystallography}, | ||
doi = {10.1107/S1600576715013369} | ||
} | ||
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@article{sunday2016mcmc, | ||
title={Evaluation of the effect of data quality on the profile uncertainty of critical dimension small angle x-ray scattering}, | ||
author={Sunday, Daniel F and List, Scott and Chawla, Jasmeet S and Kline, R Joseph}, | ||
journal={Journal of Micro/Nanolithography, MEMS, and MOEMS}, | ||
volume={15}, | ||
number={1}, | ||
pages={014001}, | ||
year={2016}, | ||
doi={10.1117/1.JMM.15.1.014001}, | ||
} | ||
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@article{hannon2016advancing, | ||
title={Advancing X-ray scattering metrology using inverse genetic algorithms}, | ||
author={Hannon, Adam F and Sunday, Daniel F and Windover, Donald and Kline, R Joseph}, | ||
journal={Journal of micro/nanolithography, MEMS, and MOEMS : JM3}, | ||
volume={15}, | ||
number={3}, | ||
pages={034001}, | ||
year={2016}, | ||
doi={10.1117/1.JMM.15.3.034001}, | ||
} |
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