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feat(route): add Resonac #16960
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Co-authored-by: Tony <TonyRL@users.noreply.github.com>
Co-authored-by: Tony <TonyRL@users.noreply.github.com>
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Successfully generated as following: http://localhost:1200/resonac/products - Failed ❌
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Successfully generated as following: http://localhost:1200/resonac/products - Failed ❌
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<webMaster>contact@rsshub.app (RSSHub)</webMaster>
<language>en</language>
<lastBuildDate>Sun, 29 Sep 2024 16:04:42 GMT</lastBuildDate>
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<item>
<title>High-Purity 20% Fluorine/Nitrogen Mixture (F2/N2)|Semi Frontend Process High-Purity Gas, Abatement Systems/Surface Treatment, High-Purity Solvent, CMP...</title>
<description><div class="str-section__inner str-section__inner--large">
<div class="m-list-label-product">
<div class="m-list-label-product__item">
<div class="m-list-label-product__item-contents">
</div><!-- /.m-list-label-product__item-contents -->
</div>
</div><!-- /.m-list-label-product -->
<div class="m-link-list-anchor">
<ul class="m-link-list-anchor__list">
<li class="m-link-list-anchor__item"><a href="https://www.resonac.com/products/semi-frontend-process/61/2028.html#anc-01" class="m-link-list-anchor__link">About the product</a></li>
<li class="m-link-list-anchor__item"><a href="https://www.resonac.com/products/semi-frontend-process/61/2028.html#extra-1" class="m-link-list-anchor__link">Merits</a></li>
<li class="m-link-list-anchor__item"><a href="https://www.resonac.com/products/semi-frontend-process/61/2028.html#extra-2" class="m-link-list-anchor__link">Characteristics</a></li>
</ul><!-- /.m-link-list-anchor__list -->
</div><!-- /.m-link-list-anchor -->
<h2 class="m-hdg-lv2">
<span class="m-hdg-lv2__title" id="anc-01">About the product</span>
</h2><!-- /.m-hdg-lv2 -->
<div class="m-lyt-media-index">
<div class="m-lyt-media-index__inner">
<div class="m-lyt-media-index__contents">
<p>Resonac’s high-purity gas used for cleaning film deposition chambers in semiconductor manufacturing and chosen mainly for 12-inch CVD equipment.</p>
</div><!-- /.m-lyt-media-index__contents -->
<div class="m-lyt-media-index__img">
<img src="https://www.resonac.com/sites/default/files/2023-11/img-products-semifront-gas-fnmix.jpg" alt="20%フッ素窒素混合ガス(F2N2)" width="400" height="297" referrerpolicy="no-referrer">
</div><!-- /.m-lyt-media-index__img -->
</div><!-- /.m-lyt-media-index__inner -->
</div><!-- /.m-lyt-media-index -->
<div class="m-box-cv-product">
<p class="m-box-cv-product__title">
<span class="m-box-cv-product__title-inner"><b>Inquiry of this product</b></span>
</p><!-- /.m-box-cv-product__title -->
<div class="m-box-cv-product__contents m-box-cv-product__contents--space-between">
<div class="m-box-cv-product__text">
<div class="m-link-list-label">
</div><!-- /.m-link-list-label -->
</div><!-- /.m-box-cv-product__text -->
<div class="m-box-cv-product__btn">
<div class="m-btn">
<a href="https://www.inquiry.resonac.com/inquiryEn?typeId=39028&amp;lsrc=productinquiry" class="m-btn__btn m-btn__btn--cv"><span class="m-btn__text">Inquiry form</span></a>
</div><!-- /.m-btn -->
</div><!-- /.m-box-cv-product__btn -->
</div><!-- /.m-box-cv-product__contents -->
</div><!-- /.m-box-cv-product -->
<h2 class="m-hdg-lv2" id="extra-1"><span class="m-hdg-lv2__inner"><span class="m-hdg-lv2__title">Merits</span> </span></h2>
<ul class="m-list">
<li class="m-list__item">A stable supply structure supported by a strong supply chain.</li>
<li class="m-list__item">Stable product quality with the technique for packaging corrosive gas.</li>
<li class="m-list__item">Relatively low global warming potential compared with other cleaning gases (GWP value = 0).</li>
<li class="m-list__item">Proven sales track record with semiconductor makers.</li>
<li class="m-list__item">High-quality technical support based on extensive marketing experience</li>
<!-- /.m-tbl-sp-break -->
</ul>
<h2 class="m-hdg-lv2" id="extra-2"><span class="m-hdg-lv2__inner"><span class="m-hdg-lv2__title">Characteristics</span> </span></h2>
<h3 class="m-hdg-lv3"><span class="m-hdg-lv3__inner"><span class="m-hdg-lv3__title">Technical Data</span></span></h3>
<div class="m-tbl-sp-break m-tbl-sp-break--not-break">
<table class="m-tbl-sp-break__tbl">
<colgroup>
<col class="w-15">
<col class="w-15">
<col class="w-40">
</colgroup>
<tbody>
<tr>
<td>Appearance / colorless or pale yellow gas</td>
<td>Odor / pungent odor</td>
</tr>
<tr>
<td>UN number / 3306</td>
<td>High-pressure gas, compressed gas, oxidized gas</td>
</tr>
<tr>
<td>Toxic</td>
<td>&nbsp;</td>
</tr>
</tbody>
</table>
</div>
<ul class="m-list-note">
<li class="m-list-note__item"><span class="m-list-note__item-set"><span class="m-list-note__symbol">※</span> <span class="m-list-note__content">Please refer to the Product Safety Data Sheet (SDS) for the gas’s detailed properties and safety data.</span> </span></li>
</ul>
<!-- /.m-tbl-sp-break -->
<h3 class="m-hdg-lv3"><span class="m-hdg-lv3__inner"><span class="m-hdg-lv3__title">Physical &amp; Chemical Properties of F<sub>2</sub>/N<sub>2</sub></span></span></h3>
<div class="m-tbl-sp-break m-tbl-sp-break--not-break">
<table class="m-tbl-sp-break__tbl" style="width: 1389.33px;">
<colgroup>
<col class="w-15">
<col class="w-15">
<col class="w-40">
</colgroup>
<thead>
<tr>
<th style="width: 189px;">Item</th>
<th style="width: 403px;">Data</th>
</tr>
</thead>
<tbody>
<tr>
<td style="width: 189px;">Physical state</td>
<td style="width: 403px;">Gas</td>
</tr>
<tr>
<td style="width: 189px;">Appearance</td>
<td style="width: 403px;">Gas</td>
</tr>
<tr>
<td style="width: 189px;">Color</td>
<td style="width: 403px;">Colorless - pale yellow</td>
</tr>
<tr>
<td style="width: 189px;">Odor</td>
<td style="width: 403px;">Characteristic pungent odor</td>
</tr>
<tr>
<td style="width: 189px;">Melting point</td>
<td style="width: 403px;">Fluorine = -219.61℃ (0.209 kPa)<br>
Nitrogen = -209.86℃ (101.3 kPa)</td>
</tr>
<tr>
<td style="width: 189px;">Boiling point</td>
<td style="width: 403px;">Fluorine = -188.13℃ (101.3 kPa)<br>
Nitrogen = -195.82℃ (101.3 kPa)</td>
</tr>
<tr>
<td style="width: 189px;">Flash point</td>
<td style="width: 403px;">Not applicable since fluorine only enhances the combustion of other substances and nitrogen is incombustible.</td>
</tr>
<tr>
<td style="width: 189px;">Vapor pressure</td>
<td style="width: 403px;">Fluorine: C.P. -129.0℃, 5.57 MPa<br>
Nitrogen: C.P. -147.2℃, 3.394 MPa</td>
</tr>
<tr>
<td style="width: 189px;">Relative vapor density (20℃)</td>
<td style="width: 403px;">1.3392 (calculation value)<br>
Fluorine = 1.696 kg/m<sup>3</sup> (0 ℃, 101.3 kPa)<br>
Nitrogen = 1.2507 kg/m<sup>3</sup> (0℃, 101.3 kPa)</td>
</tr>
</tbody>
</table>
</div>
<div class="m-box-cv-product">
<p class="m-box-cv-product__title">
<span class="m-box-cv-product__title-inner"><b>Inquiry of this product</b></span>
</p><!-- /.m-box-cv-product__title -->
<div class="m-box-cv-product__contents m-box-cv-product__contents--space-between">
<div class="m-box-cv-product__text">
<div class="m-link-list-label">
</div><!-- /.m-link-list-label -->
</div><!-- /.m-box-cv-product__text -->
<div class="m-box-cv-product__btn">
<div class="m-btn">
<a href="https://www.inquiry.resonac.com/inquiryEn?typeId=39028&amp;lsrc=productinquiry" class="m-btn__btn m-btn__btn--cv"><span class="m-btn__text">Inquiry form</span></a>
</div><!-- /.m-btn -->
</div><!-- /.m-box-cv-product__btn -->
</div><!-- /.m-box-cv-product__contents -->
</div><!-- /.m-box-cv-product -->
</div><!-- /.str-section__inner -->
</description>
<link>https://www.resonac.com/products/semi-frontend-process/61/2028.html</link>
<guid isPermaLink="false">https://www.resonac.com/products/semi-frontend-process/61/2028.html</guid>
<pubDate>Sun, 29 Sep 2024 00:00:00 GMT</pubDate>
</item>
<item>
<title>High-Purity Silicon Tetrafluoride (SiF4)|Semi Frontend Process High-Purity Gas, Abatement Systems/Surface Treatment, High-Purity Solvent, CMP Slurry, ...</title>
<description><div class="str-section__inner str-section__inner--large">
<div class="m-list-label-product">
<div class="m-list-label-product__item">
<div class="m-list-label-product__item-contents">
</div><!-- /.m-list-label-product__item-contents -->
</div>
</div><!-- /.m-list-label-product -->
<div class="m-link-list-anchor">
<ul class="m-link-list-anchor__list">
<li class="m-link-list-anchor__item"><a href="https://www.resonac.com/products/semi-frontend-process/61/2025.html#anc-01" class="m-link-list-anchor__link">About the product</a></li>
<li class="m-link-list-anchor__item"><a href="https://www.resonac.com/products/semi-frontend-process/61/2025.html#extra-1" class="m-link-list-anchor__link">Merits</a></li>
<li class="m-link-list-anchor__item"><a href="https://www.resonac.com/products/semi-frontend-process/61/2025.html#extra-2" class="m-link-list-anchor__link">Characteristics</a></li>
</ul><!-- /.m-link-list-anchor__list -->
</div><!-- /.m-link-list-anchor -->
<h2 class="m-hdg-lv2">
<span class="m-hdg-lv2__title" id="anc-01">About the product</span>
</h2><!-- /.m-hdg-lv2 -->
<div class="m-lyt-media-index">
<div class="m-lyt-media-index__inner">
<div class="m-lyt-media-index__contents">
<p>Resonac’s high-purity gas used for conductor etching in semiconductor manufacturing is chosen for various types of etching and forming SiOF or optical fibers.</p>
</div><!-- /.m-lyt-media-index__contents -->
<div class="m-lyt-media-index__img">
<img src="https://www.resonac.com/sites/default/files/2023-11/img-products-semifront-gas-sif4.jpg" alt="四フッ化ケイ素(SiF4)" width="400" height="297" referrerpolicy="no-referrer">
</div><!-- /.m-lyt-media-index__img -->
</div><!-- /.m-lyt-media-index__inner -->
</div><!-- /.m-lyt-media-index -->
<div class="m-box-cv-product">
<p class="m-box-cv-product__title">
<span class="m-box-cv-product__title-inner"><b>Inquiry of this product</b></span>
</p><!-- /.m-box-cv-product__title -->
<div class="m-box-cv-product__contents m-box-cv-product__contents--space-between">
<div class="m-box-cv-product__text">
<div class="m-link-list-label">
</div><!-- /.m-link-list-label -->
</div><!-- /.m-box-cv-product__text -->
<div class="m-box-cv-product__btn">
<div class="m-btn">
<a href="https://www.inquiry.resonac.com/inquiryEn?typeId=39025&amp;lsrc=productinquiry" class="m-btn__btn m-btn__btn--cv"><span class="m-btn__text">Inquiry form</span></a>
</div><!-- /.m-btn -->
</div><!-- /.m-box-cv-product__btn -->
</div><!-- /.m-box-cv-product__contents -->
</div><!-- /.m-box-cv-product -->
<h2 class="m-hdg-lv2" id="extra-1"><span class="m-hdg-lv2__inner"><span class="m-hdg-lv2__title">Merits </span> </span></h2>
<ul class="m-list">
<li class="m-list__item">A stable supply structure supported by a strong supply chain.</li>
<li class="m-list__item">Proven sales track record with semiconductor makers.</li>
<li class="m-list__item">High-quality technical support based on extensive marketing experience.</li>
</ul>
<h2 class="m-hdg-lv2" id="extra-2"><span class="m-hdg-lv2__inner"><span class="m-hdg-lv2__title">Characteristics</span> </span></h2>
<h3 class="m-hdg-lv3"><span class="m-hdg-lv3__inner"><span class="m-hdg-lv3__title">Technical Data</span></span></h3>
<div class="m-tbl-sp-break m-tbl-sp-break--not-break">
<table class="m-tbl-sp-break__tbl">
<colgroup>
<col class="w-15">
<col class="w-15">
<col class="w-40">
</colgroup>
<tbody>
<tr>
<td>Appearance / colorless gas or liquid</td>
<td>Odor / pungent odor</td>
</tr>
<tr>
<td>CAS NO / 7783-61-1</td>
<td>UN number / 1859</td>
</tr>
<tr>
<td>Incombustible, corrosive gas</td>
<td>Toxic</td>
</tr>
</tbody>
</table>
</div>
<ul class="m-list-note">
<li class="m-list-note__item"><span class="m-list-note__item-set"><span class="m-list-note__symbol">※</span> <span class="m-list-note__content">Please refer to the Product Safety Data Sheet&nbsp; (SDS) for the gas’s detailed properties and safety data.</span> </span></li>
</ul>
<h3 class="m-hdg-lv3"><span class="m-hdg-lv3__inner"><span class="m-hdg-lv3__title">Physical &amp; Chemical Properties of SiF<sub>4</sub></span></span></h3>
<div class="m-tbl-sp-break m-tbl-sp-break--not-break">
<table class="m-tbl-sp-break__tbl" style="width: 1025.33px;">
<colgroup>
<col class="w-15">
<col class="w-15">
<col class="w-40">
</colgroup>
<thead>
<tr>
<th style="width: 189px;">Item</th>
<th style="width: 509px;">Data</th>
</tr>
</thead>
<tbody>
<tr>
<td style="width: 189px;">Physical state</td>
<td style="width: 509px;">Gas</td>
</tr>
<tr>
<td style="width: 189px;">Appearance</td>
<td style="width: 509px;">Liquefied gas</td>
</tr>
<tr>
<td style="width: 189px;">Color</td>
<td style="width: 509px;">Colorless</td>
</tr>
<tr>
<td style="width: 189px;">Odor</td>
<td style="width: 509px;">Characteristic odor (pungent odor)</td>
</tr>
<tr>
<td style="width: 189px;">pH</td>
<td style="width: 509px;">Not applicable</td>
</tr>
<tr>
<td style="width: 189px;">Melting point</td>
<td style="width: 509px;">-95.7 ℃</td>
</tr>
<tr>
<td style="width: 189px;">Boiling point</td>
<td style="width: 509px;">-65℃ (0.2 MPa)</td>
</tr>
<tr>
<td style="width: 189px;">Flash point</td>
<td style="width: 509px;">Not applicable</td>
</tr>
<tr>
<td style="width: 189px;">Critical temperature</td>
<td style="width: 509px;">-14.20℃</td>
</tr>
<tr>
<td style="width: 189px;">Critical pressure</td>
<td style="width: 509px;">3.72 MPa</td>
</tr>
<tr>
<td style="width: 189px;">Relative vapor density (20℃)</td>
<td style="width: 509px;">4.67 g/L (-1℃)</td>
</tr>
<tr>
<td style="width: 189px;">Relative density</td>
<td style="width: 509px;">3.57 (air = 1, 15℃)</td>
</tr>
<tr>
<td style="width: 189px;">Density</td>
<td style="width: 509px;">4.67 g/l (-1℃)</td>
</tr>
</tbody>
</table>
</div>
<div class="m-box-cv-product">
<p class="m-box-cv-product__title">
<span class="m-box-cv-product__title-inner"><b>Inquiry of this product</b></span>
</p><!-- /.m-box-cv-product__title -->
<div class="m-box-cv-product__contents m-box-cv-product__contents--space-between">
<div class="m-box-cv-product__text">
<div class="m-link-list-label">
</div><!-- /.m-link-list-label -->
</div><!-- /.m-box-cv-product__text -->
<div class="m-box-cv-product__btn">
<div class="m-btn">
<a href="https://www.inquiry.resonac.com/inquiryEn?typeId=39025&amp;lsrc=productinquiry" class="m-btn__btn m-btn__btn--cv"><span class="m-btn__text">Inquiry form</span></a>
</div><!-- /.m-btn -->
</div><!-- /.m-box-cv-product__btn -->
</div><!-- /.m-box-cv-product__contents -->
</div><!-- /.m-box-cv-product -->
</div><!-- /.str-section__inner -->
</description>
<link>https://www.resonac.com/products/semi-frontend-process/61/2025.html</link>
<guid isPermaLink="false">https://www.resonac.com/products/semi-frontend-process/61/2025.html</guid>
<pubDate>Sun, 29 Sep 2024 00:00:00 GMT</pubDate>
</item>
<item>
<title>High-Purity Hydrogen Fluoride (HF)|Semi Frontend Process High-Purity Gas, Abatement Systems/Surface Treatment, High-Purity Solvent, CMP Slurry, Anti-c...</title>
<description><div class="str-section__inner str-section__inner--large">
<div class="m-list-label-product">
<div class="m-list-label-product__item">
<div class="m-list-label-product__item-contents">
</div><!-- /.m-list-label-product__item-contents -->
</div>
</div><!-- /.m-list-label-product -->
<div class="m-link-list-anchor">
<ul class="m-link-list-anchor__list">
<li class="m-link-list-anchor__item"><a href="https://www.resonac.com/products/semi-frontend-process/61/2024.html#anc-01" class="m-link-list-anchor__link">About the product</a></li>
<li class="m-link-list-anchor__item"><a href="https://www.resonac.com/products/semi-frontend-process/61/2024.html#extra-1" class="m-link-list-anchor__link">Merits</a></li>
<li class="m-link-list-anchor__item"><a href="https://www.resonac.com/products/semi-frontend-process/61/2024.html#extra-2" class="m-link-list-anchor__link">Characteristics</a></li>
</ul><!-- /.m-link-list-anchor__list -->
</div><!-- /.m-link-list-anchor -->
<h2 class="m-hdg-lv2">
<span class="m-hdg-lv2__title" id="anc-01">About the product</span>
</h2><!-- /.m-hdg-lv2 -->
<div class="m-lyt-media-index">
<div class="m-lyt-media-index__inner">
<div class="m-lyt-media-index__contents">
<p>Resonac’s high-purity gas used for etching insulating films in semiconductor manufacturing is particularly suitable for etching oxide films and chosen for etching natural oxide films on the surface of silicon.</p>
</div><!-- /.m-lyt-media-index__contents -->
<div class="m-lyt-media-index__img">
<img src="https://www.resonac.com/sites/default/files/2023-11/img-products-semifront-gas-hf.jpg" alt="フッ化水素(HF)" width="400" height="297" referrerpolicy="no-referrer">
</div><!-- /.m-lyt-media-index__img -->
</div><!-- /.m-lyt-media-index__inner -->
</div><!-- /.m-lyt-media-index -->
<div class="m-box-cv-product">
<p class="m-box-cv-product__title">
<span class="m-box-cv-product__title-inner"><b>Inquiry of this product</b></span>
</p><!-- /.m-box-cv-product__title -->
<div class="m-box-cv-product__contents m-box-cv-product__contents--space-between">
<div class="m-box-cv-product__text">
<div class="m-link-list-label">
</div><!-- /.m-link-list-label -->
</div><!-- /.m-box-cv-product__text -->
<div class="m-box-cv-product__btn">
<div class="m-btn">
<a href="https://www.inquiry.resonac.com/inquiryEn?typeId=39024&amp;lsrc=productinquiry" class="m-btn__btn m-btn__btn--cv"><span class="m-btn__text">Inquiry form</span></a>
</div><!-- /.m-btn -->
</div><!-- /.m-box-cv-product__btn -->
</div><!-- /.m-box-cv-product__contents -->
</div><!-- /.m-box-cv-product -->
<h2 class="m-hdg-lv2" id="extra-1"><span class="m-hdg-lv2__inner"><span class="m-hdg-lv2__title">Merits </span> </span></h2>
<ul class="m-list">
<li class="m-list__item">A stable supply structure supported by a strong supply chain.</li>
<li class="m-list__item">Stable product quality with the technique for packaging corrosive gas.</li>
<li class="m-list__item">Proven sales track record with semiconductor makers.</li>
<li class="m-list__item">High-quality technical support based on extensive marketing experience.</li>
</ul>
<h2 class="m-hdg-lv2" id="extra-2"><span class="m-hdg-lv2__inner"><span class="m-hdg-lv2__title">Characteristics</span> </span></h2>
<h3 class="m-hdg-lv3"><span class="m-hdg-lv3__inner"><span class="m-hdg-lv3__title">Technical Data</span></span></h3>
<div class="m-tbl-sp-break m-tbl-sp-break--not-break">
<table class="m-tbl-sp-break__tbl">
<colgroup>
<col class="w-15">
<col class="w-15">
<col class="w-40">
</colgroup>
<tbody>
<tr>
<td>Appearance / colorless gas or liquid</td>
<td>Odor / pungent odor</td>
</tr>
<tr>
<td>CAS NO / 7664-39-3</td>
<td>UN number / 1052</td>
</tr>
<tr>
<td>Incombustible, corrosive gas</td>
<td>Toxic</td>
</tr>
</tbody>
</table>
</div>
<ul class="m-list-note">
<li class="m-list-note__item"><span class="m-list-note__item-set"><span class="m-list-note__symbol">※</span> <span class="m-list-note__content">Please refer to the Product Safety Data Sheet (SDS) for the gas’s detailed properties and safety data.</span> </span></li>
</ul>
<h3 class="m-hdg-lv3"><span class="m-hdg-lv3__inner"><span class="m-hdg-lv3__title">Physical &amp; Chemical Properties of HF</span></span></h3>
<div class="m-tbl-sp-break m-tbl-sp-break--not-break">
<table class="m-tbl-sp-break__tbl" style="width: 1025.33px;">
<colgroup>
<col class="w-15">
<col class="w-15">
<col class="w-40">
</colgroup>
<thead>
<tr>
<th style="width: 189px;">Item</th>
<th style="width: 509px;">Data</th>
</tr>
</thead>
<tbody>
<tr>
<td style="width: 189px;">Physical state</td>
<td style="width: 509px;">Liquid</td>
</tr>
<tr>
<td style="width: 189px;">Appearance</td>
<td style="width: 509px;">Liquid</td>
</tr>
<tr>
<td style="width: 189px;">Color</td>
<td style="width: 509px;">Colorless</td>
</tr>
<tr>
<td style="width: 189px;">Odor</td>
<td style="width: 509px;">Strong pungent odor</td>
</tr>
<tr>
<td style="width: 189px;">Odor threshold (ppm)</td>
<td style="width: 509px;">0.042ppm</td>
</tr>
<tr>
<td style="width: 189px;">pH</td>
<td style="width: 509px;">Strong acid (pH of the 2% solution is 1 or lower)</td>
</tr>
<tr>
<td style="width: 189px;">Melting point</td>
<td style="width: 509px;">-83.53 ℃</td>
</tr>
<tr>
<td style="width: 189px;">Boiling point</td>
<td style="width: 509px;">19.51 ℃</td>
</tr>
<tr>
<td style="width: 189px;">Vapor pressure</td>
<td style="width: 509px;">103.3 kPa (20℃)</td>
</tr>
<tr>
<td style="width: 189px;">Relative vapor density (20℃)</td>
<td style="width: 509px;">0.69 (air = 1, calculation value)</td>
</tr>
<tr>
<td style="width: 189px;">Relative density</td>
<td style="width: 509px;">0.987 (20℃)</td>
</tr>
</tbody>
</table>
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<link>https://www.resonac.com/products/semi-frontend-process/61/2024.html</link>
<guid isPermaLink="false">https://www.resonac.com/products/semi-frontend-process/61/2024.html</guid>
<pubDate>Sun, 29 Sep 2024 00:00:00 GMT</pubDate>
</item>
<item>
<title>High-Purity Sulfur Dioxide (SO2)|Semi Frontend Process High-Purity Gas, Abatement Systems/Surface Treatment, High-Purity Solvent, CMP Slurry, Anti-cha...</title>
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<li class="m-link-list-anchor__item"><a href="https://www.resonac.com/products/semi-frontend-process/61/2027.html#extra-1" class="m-link-list-anchor__link">Merits</a></li>
<li class="m-link-list-anchor__item"><a href="https://www.resonac.com/products/semi-frontend-process/61/2027.html#extra-2" class="m-link-list-anchor__link">Characteristics</a></li>
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<h2 class="m-hdg-lv2">
<span class="m-hdg-lv2__title" id="anc-01">About the product</span>
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<div class="m-lyt-media-index">
<div class="m-lyt-media-index__inner">
<div class="m-lyt-media-index__contents">
<p>Resonac’s high-purity gas used for etching insulating films in semiconductor manufacturing is particularly suitable for etching organic films and chosen for etching carbon masks.</p>
</div><!-- /.m-lyt-media-index__contents -->
<div class="m-lyt-media-index__img">
<img src="https://www.resonac.com/sites/default/files/2023-11/img-products-semifront-gas-so2.jpg" alt="亜硫酸ガス(SO2)" width="400" height="297" referrerpolicy="no-referrer">
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<h2 class="m-hdg-lv2" id="extra-1"><span class="m-hdg-lv2__inner"><span class="m-hdg-lv2__title">Merits</span> </span></h2>
<ul class="m-list">
<li class="m-list__item">A stable supply structure supported by a strong supply chain.</li>
<li class="m-list__item">Proven sales track record with semiconductor makers.</li>
<li class="m-list__item">High-quality technical support based on extensive marketing experience.</li>
<!-- /.m-tbl-sp-break -->
</ul>
<h2 class="m-hdg-lv2" id="extra-2"><span class="m-hdg-lv2__inner"><span class="m-hdg-lv2__title">Characteristics</span> </span></h2>
<h3 class="m-hdg-lv3"><span class="m-hdg-lv3__inner"><span class="m-hdg-lv3__title">Technical Data</span></span></h3>
<div class="m-tbl-sp-break m-tbl-sp-break--not-break">
<table class="m-tbl-sp-break__tbl">
<colgroup>
<col class="w-15">
<col class="w-15">
<col class="w-40">
</colgroup>
<tbody>
<tr>
<td>Appearance / colorless gas</td>
<td>Odor / pungent odor</td>
</tr>
<tr>
<td>CAS NO / 7446-09-5</td>
<td>UN number / 1079</td>
</tr>
<tr>
<td>High-pressure gas, liquefied gas</td>
<td>Toxic</td>
</tr>
</tbody>
</table>
</div>
<ul class="m-list-note">
<li class="m-list-note__item"><span class="m-list-note__item-set"><span class="m-list-note__symbol">※</span> <span class="m-list-note__content">Please refer to the Product Safety Data Sheet (SDS) for the gas’s detailed properties and safety data.</span> </span></li>
</ul>
<!-- /.m-tbl-sp-break -->
<h3 class="m-hdg-lv3"><span class="m-hdg-lv3__inner"><span class="m-hdg-lv3__title">Physical &amp; Chemical Properties of SO<sub>2</sub></span></span></h3>
<div class="m-tbl-sp-break m-tbl-sp-break--not-break">
<table class="m-tbl-sp-break__tbl" style="width: 1457.85px;">
<colgroup>
<col class="w-15">
<col class="w-15">
<col class="w-40">
</colgroup>
<thead>
<tr>
<th style="width: 189px;">Item</th>
<th style="width: 364.069px;">Data</th>
</tr>
</thead>
<tbody>
<tr>
<td style="width: 189px;">Physical state</td>
<td style="width: 364.069px;">Gas</td>
</tr>
<tr>
<td style="width: 189px;">Appearance</td>
<td style="width: 364.069px;">Liquefied gas</td>
</tr>
<tr>
<td style="width: 189px;">Color</td>
<td style="width: 364.069px;">Colorless</td>
</tr>
<tr>
<td style="width: 189px;">Odor</td>
<td style="width: 364.069px;">Pungent odor</td>
</tr>
<tr>
<td style="width: 189px;">Odor threshold (ppm)</td>
<td style="width: 364.069px;">0.3 – 3 ppm</td>
</tr>
<tr>
<td style="width: 189px;">pH</td>
<td style="width: 364.069px;">Not applicable</td>
</tr>
<tr>
<td style="width: 189px;">Melting point</td>
<td style="width: 364.069px;">-75.5℃</td>
</tr>
<tr>
<td style="width: 189px;">Boiling point</td>
<td style="width: 364.069px;">-10.0℃</td>
</tr>
<tr>
<td style="width: 189px;">Flash point</td>
<td style="width: 364.069px;">Not applicable (incombustible)</td>
</tr>
<tr>
<td style="width: 189px;">Critical temperature</td>
<td style="width: 364.069px;">51.49 ℃</td>
</tr>
<tr>
<td style="width: 189px;">Autoignition point</td>
<td style="width: 364.069px;">Not applicable (incombustible)</td>
</tr>
<tr>
<td style="width: 189px;">Vapor pressure</td>
<td style="width: 364.069px;">330 kPa (20℃)</td>
</tr>
<tr>
<td style="width: 189px;">Relative density</td>
<td style="width: 364.069px;">Relative vapor density 2.2 (air = 1)</td>
</tr>
<tr>
<td style="width: 189px;">Density</td>
<td style="width: 364.069px;">Gas 2.927 kg/m<sup>3</sup> (0℃,101.3 kPa)&nbsp;<br>
Liquid 1.460 g/cm<sup>3</sup> (-10℃)</td>
</tr>
</tbody>
</table>
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</description>
<link>https://www.resonac.com/products/semi-frontend-process/61/2027.html</link>
<guid isPermaLink="false">https://www.resonac.com/products/semi-frontend-process/61/2027.html</guid>
<pubDate>Sun, 29 Sep 2024 00:00:00 GMT</pubDate>
</item>
<item>
<title>High-Purity Hydrogen Chloride (HCl)|Semi Frontend Process High-Purity Gas, Abatement Systems/Surface Treatment, High-Purity Solvent, CMP Slurry, Anti-...</title>
<description><div class="str-section__inner str-section__inner--large">
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</div>
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<div class="m-link-list-anchor">
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<li class="m-link-list-anchor__item"><a href="https://www.resonac.com/products/semi-frontend-process/61/2026.html#anc-01" class="m-link-list-anchor__link">About the product</a></li>
<li class="m-link-list-anchor__item"><a href="https://www.resonac.com/products/semi-frontend-process/61/2026.html#extra-1" class="m-link-list-anchor__link">Merits</a></li>
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<div class="m-lyt-media-index">
<div class="m-lyt-media-index__inner">
<div class="m-lyt-media-index__contents">
<p>Resonac’s gas used for forming conductor film in semiconductor manufacturing is particularly suitable for the deposition of silicon films and chosen for forming silicon channel films as well as cleaning.</p>
</div><!-- /.m-lyt-media-index__contents -->
<div class="m-lyt-media-index__img">
<img src="https://www.resonac.com/sites/default/files/2023-11/img-products-semifront-gas-hcl.jpg" alt="塩化水素(HCl)" width="400" height="297" referrerpolicy="no-referrer">
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<h2 class="m-hdg-lv2" id="extra-1"><span class="m-hdg-lv2__inner"><span class="m-hdg-lv2__title">Merits</span> </span></h2>
<ul class="m-list">
<li class="m-list__item">A stable supply structure supported by a strong supply chain.</li>
<li class="m-list__item">Stable product quality with the technique for packaging corrosive gas.</li>
<li class="m-list__item">Proven sales track record with semiconductor makers.</li>
<li class="m-list__item">High-quality technical support based on extensive marketing experience.</li>
<!-- /.m-tbl-sp-break -->
</ul>
<h2 class="m-hdg-lv2" id="extra-2"><span class="m-hdg-lv2__inner"><span class="m-hdg-lv2__title">Characteristics</span> </span></h2>
<h3 class="m-hdg-lv3"><span class="m-hdg-lv3__inner"><span class="m-hdg-lv3__title">Technical Data</span></span></h3>
<div class="m-tbl-sp-break m-tbl-sp-break--not-break">
<table class="m-tbl-sp-break__tbl">
<colgroup>
<col class="w-15">
<col class="w-15">
<col class="w-40">
</colgroup>
<tbody>
<tr>
<td>Appearance / colorless gas or liquid</td>
<td>Odor / pungent odor</td>
</tr>
<tr>
<td>CAS NO / 7647-01-0</td>
<td>UN number / 1050</td>
</tr>
<tr>
<td>High-pressure gas, liquefied gas</td>
<td>Toxic, corrosive</td>
</tr>
</tbody>
</table>
</div>
<ul class="m-list-note">
<li class="m-list-note__item"><span class="m-list-note__item-set"><span class="m-list-note__symbol">※</span> <span class="m-list-note__content">Please refer to the Product Safety Data Sheet (SDS) for the gas’s detailed properties and safety data.</span> </span></li>
</ul>
<!-- /.m-tbl-sp-break -->
<h3 class="m-hdg-lv3"><span class="m-hdg-lv3__inner"><span class="m-hdg-lv3__title">Physical &amp; Chemical Properties of&nbsp;CH<sub>3</sub>F</span></span></h3>
<div class="m-tbl-sp-break m-tbl-sp-break--not-break">
<table class="m-tbl-sp-break__tbl" style="width: 1389.33px;">
<colgroup>
<col class="w-15">
<col class="w-15">
<col class="w-40">
</colgroup>
<thead>
<tr>
<th style="width: 189px;">Item</th>
<th style="width: 403px;">Data</th>
</tr>
</thead>
<tbody>
<tr>
<td style="width: 189px;">Physical state</td>
<td style="width: 403px;">Gas</td>
</tr>
<tr>
<td style="width: 189px;">Appearance</td>
<td style="width: 403px;">Liquefied gas</td>
</tr>
<tr>
<td style="width: 189px;">Color</td>
<td style="width: 403px;">Colorless</td>
</tr>
<tr>
<td style="width: 189px;">Odor</td>
<td style="width: 403px;">Pungent odor</td>
</tr>
<tr>
<td style="width: 189px;">pH</td>
<td style="width: 403px;">0.1 (1.0N)<br>
1.10 (0.1N)<br>
2.02 (0.01N)<br>
3.02 (0.001N)<br>
4.01 (0.0001N)</td>
</tr>
<tr>
<td style="width: 189px;">Melting point</td>
<td style="width: 403px;">-114.22℃</td>
</tr>
<tr>
<td style="width: 189px;">Boiling point</td>
<td style="width: 403px;">-85.05℃ (1013 hPa)</td>
</tr>
<tr>
<td style="width: 189px;">Flash point</td>
<td style="width: 403px;">Incombustible</td>
</tr>
<tr>
<td style="width: 189px;">Critical temperature</td>
<td style="width: 403px;">51.49 ℃</td>
</tr>
<tr>
<td style="width: 189px;">Autoignition point</td>
<td style="width: 403px;">Incombustible</td>
</tr>
<tr>
<td style="width: 189px;">Vapor pressure</td>
<td style="width: 403px;">35424 mm Hg (25℃)</td>
</tr>
<tr>
<td style="width: 189px;">Critical pressure</td>
<td style="width: 403px;">81.6 atm</td>
</tr>
<tr>
<td style="width: 189px;">Relative density</td>
<td style="width: 403px;">1.268 (air = 1)</td>
</tr>
<tr>
<td style="width: 189px;">Density</td>
<td style="width: 403px;">1.639 g/cm³ (0℃)</td>
</tr>
<tr>
<td style="width: 189px;">Explosive limits (upper, lower) (g/m³)</td>
<td style="width: 403px;">Not applicable (incombustible)</td>
</tr>
</tbody>
</table>
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</description>
<link>https://www.resonac.com/products/semi-frontend-process/61/2026.html</link>
<guid isPermaLink="false">https://www.resonac.com/products/semi-frontend-process/61/2026.html</guid>
<pubDate>Sun, 29 Sep 2024 00:00:00 GMT</pubDate>
</item>
<item>
<title>High-Purity HFC-41 (CH3F)|Semi Frontend Process High-Purity Gas, Abatement Systems/Surface Treatment, High-Purity Solvent, CMP Slurry, Anti-charging M...</title>
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<li class="m-link-list-anchor__item"><a href="https://www.resonac.com/products/semi-frontend-process/61/2017.html#extra-1" class="m-link-list-anchor__link">Merits</a></li>
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<div class="m-lyt-media-index">
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<div class="m-lyt-media-index__contents">
<p>Resonac’s high-purity gas used for etching insulating films in semiconductor manufacturing, and particularly suitable for etching nitride films.</p>
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<h2 class="m-hdg-lv2" id="extra-1"><span class="m-hdg-lv2__inner"><span class="m-hdg-lv2__title">Merits</span> </span></h2>
<ul class="m-list">
<li class="m-list__item">Used for etching various types of nitride films.</li>
<li class="m-list__item">Boasts one of the industry’s largest production volumes and a stable supply structure supported by a strong supply chain from multiple production sites.</li>
<li class="m-list__item">Relatively low global warming potential among HFC gases (GWP value = 92).</li>
<li class="m-list__item">Proven sales track record with semiconductor makers.</li>
<li class="m-list__item">High-quality technical support based on extensive marketing experience.</li>
<!-- /.m-tbl-sp-break -->
</ul>
<h2 class="m-hdg-lv2" id="extra-2"><span class="m-hdg-lv2__inner"><span class="m-hdg-lv2__title">Characteristics</span> </span></h2>
<h3 class="m-hdg-lv3"><span class="m-hdg-lv3__inner"><span class="m-hdg-lv3__title">Technical Data</span></span></h3>
<div class="m-tbl-sp-break m-tbl-sp-break--not-break">
<table class="m-tbl-sp-break__tbl">
<colgroup>
<col class="w-15">
<col class="w-15">
<col class="w-40">
</colgroup>
<tbody>
<tr>
<td>Appearance / colorless gas</td>
<td>Odor / odorless</td>
</tr>
<tr>
<td>CAS NO / 593-53-3</td>
<td>UN number / 2454</td>
</tr>
<tr>
<td>High-pressure gas</td>
<td>Combustible</td>
</tr>
</tbody>
</table>
</div>
<ul class="m-list-note">
<li class="m-list-note__item"><span class="m-list-note__item-set"><span class="m-list-note__symbol">※</span> <span class="m-list-note__content">Please refer to the Product Safety Data Sheet (SDS) for the gas’s detailed properties and safety data.</span> </span></li>
</ul>
<!-- /.m-tbl-sp-break -->
<h3 class="m-hdg-lv3"><span class="m-hdg-lv3__inner"><span class="m-hdg-lv3__title">Physical &amp; Chemical Properties of&nbsp;CH<sub>3</sub>F</span></span></h3>
<div class="m-tbl-sp-break m-tbl-sp-break--not-break">
<table class="m-tbl-sp-break__tbl" style="width: 1389.33px;">
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<th style="width: 189px;">Item</th>
<th style="width: 403px;">Data</th>
</tr>
</thead>
<tbody>
<tr>
<td style="width: 189px;">Physical state</td>
<td style="width: 403px;">Gas</td>
</tr>
<tr>
<td style="width: 189px;">Appearance</td>
<td style="width: 403px;">Liquefied gas</td>
</tr>
<tr>
<td style="width: 189px;">Color</td>
|
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<item>
<title>High-Purity 20% Fluorine/Nitrogen Mixture (F2/N2) | Semi Frontend Process High-Purity Gas, Abatement Systems/Surface Treatment, High-Purity Solvent, C...</title>
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<li class="m-link-list-anchor__item"><a href="https://www.resonac.com/products/semi-frontend-process/61/2028.html#extra-1" class="m-link-list-anchor__link">Merits</a></li>
<li class="m-link-list-anchor__item"><a href="https://www.resonac.com/products/semi-frontend-process/61/2028.html#extra-2" class="m-link-list-anchor__link">Characteristics</a></li>
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<h2 class="m-hdg-lv2">
<span class="m-hdg-lv2__title" id="anc-01">About the product</span>
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<div class="m-lyt-media-index">
<div class="m-lyt-media-index__inner">
<div class="m-lyt-media-index__contents">
<p>Resonac’s high-purity gas used for cleaning film deposition chambers in semiconductor manufacturing and chosen mainly for 12-inch CVD equipment.</p>
</div><!-- /.m-lyt-media-index__contents -->
<div class="m-lyt-media-index__img">
<img src="https://www.resonac.com/sites/default/files/2023-11/img-products-semifront-gas-fnmix.jpg" alt="20%フッ素窒素混合ガス(F2N2)" width="400" height="297" referrerpolicy="no-referrer">
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<h2 class="m-hdg-lv2" id="extra-1"><span class="m-hdg-lv2__inner"><span class="m-hdg-lv2__title">Merits</span> </span></h2>
<ul class="m-list">
<li class="m-list__item">A stable supply structure supported by a strong supply chain.</li>
<li class="m-list__item">Stable product quality with the technique for packaging corrosive gas.</li>
<li class="m-list__item">Relatively low global warming potential compared with other cleaning gases (GWP value = 0).</li>
<li class="m-list__item">Proven sales track record with semiconductor makers.</li>
<li class="m-list__item">High-quality technical support based on extensive marketing experience</li>
<!-- /.m-tbl-sp-break -->
</ul>
<h2 class="m-hdg-lv2" id="extra-2"><span class="m-hdg-lv2__inner"><span class="m-hdg-lv2__title">Characteristics</span> </span></h2>
<h3 class="m-hdg-lv3"><span class="m-hdg-lv3__inner"><span class="m-hdg-lv3__title">Technical Data</span></span></h3>
<div class="m-tbl-sp-break m-tbl-sp-break--not-break">
<table class="m-tbl-sp-break__tbl">
<colgroup>
<col class="w-15">
<col class="w-15">
<col class="w-40">
</colgroup>
<tbody>
<tr>
<td>Appearance / colorless or pale yellow gas</td>
<td>Odor / pungent odor</td>
</tr>
<tr>
<td>UN number / 3306</td>
<td>High-pressure gas, compressed gas, oxidized gas</td>
</tr>
<tr>
<td>Toxic</td>
<td>&nbsp;</td>
</tr>
</tbody>
</table>
</div>
<ul class="m-list-note">
<li class="m-list-note__item"><span class="m-list-note__item-set"><span class="m-list-note__symbol">※</span> <span class="m-list-note__content">Please refer to the Product Safety Data Sheet (SDS) for the gas’s detailed properties and safety data.</span> </span></li>
</ul>
<!-- /.m-tbl-sp-break -->
<h3 class="m-hdg-lv3"><span class="m-hdg-lv3__inner"><span class="m-hdg-lv3__title">Physical &amp; Chemical Properties of F<sub>2</sub>/N<sub>2</sub></span></span></h3>
<div class="m-tbl-sp-break m-tbl-sp-break--not-break">
<table class="m-tbl-sp-break__tbl" style="width: 1389.33px;">
<colgroup>
<col class="w-15">
<col class="w-15">
<col class="w-40">
</colgroup>
<thead>
<tr>
<th style="width: 189px;">Item</th>
<th style="width: 403px;">Data</th>
</tr>
</thead>
<tbody>
<tr>
<td style="width: 189px;">Physical state</td>
<td style="width: 403px;">Gas</td>
</tr>
<tr>
<td style="width: 189px;">Appearance</td>
<td style="width: 403px;">Gas</td>
</tr>
<tr>
<td style="width: 189px;">Color</td>
<td style="width: 403px;">Colorless - pale yellow</td>
</tr>
<tr>
<td style="width: 189px;">Odor</td>
<td style="width: 403px;">Characteristic pungent odor</td>
</tr>
<tr>
<td style="width: 189px;">Melting point</td>
<td style="width: 403px;">Fluorine = -219.61℃ (0.209 kPa)<br>
Nitrogen = -209.86℃ (101.3 kPa)</td>
</tr>
<tr>
<td style="width: 189px;">Boiling point</td>
<td style="width: 403px;">Fluorine = -188.13℃ (101.3 kPa)<br>
Nitrogen = -195.82℃ (101.3 kPa)</td>
</tr>
<tr>
<td style="width: 189px;">Flash point</td>
<td style="width: 403px;">Not applicable since fluorine only enhances the combustion of other substances and nitrogen is incombustible.</td>
</tr>
<tr>
<td style="width: 189px;">Vapor pressure</td>
<td style="width: 403px;">Fluorine: C.P. -129.0℃, 5.57 MPa<br>
Nitrogen: C.P. -147.2℃, 3.394 MPa</td>
</tr>
<tr>
<td style="width: 189px;">Relative vapor density (20℃)</td>
<td style="width: 403px;">1.3392 (calculation value)<br>
Fluorine = 1.696 kg/m<sup>3</sup> (0 ℃, 101.3 kPa)<br>
Nitrogen = 1.2507 kg/m<sup>3</sup> (0℃, 101.3 kPa)</td>
</tr>
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</table>
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<pubDate>Sun, 29 Sep 2024 00:00:00 GMT</pubDate>
</item>
<item>
<title>High-Purity Silicon Tetrafluoride (SiF4) | Semi Frontend Process High-Purity Gas, Abatement Systems/Surface Treatment, High-Purity Solvent, CMP Slurry...</title>
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<p>Resonac’s high-purity gas used for conductor etching in semiconductor manufacturing is chosen for various types of etching and forming SiOF or optical fibers.</p>
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<img src="https://www.resonac.com/sites/default/files/2023-11/img-products-semifront-gas-sif4.jpg" alt="四フッ化ケイ素(SiF4)" width="400" height="297" referrerpolicy="no-referrer">
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<h2 class="m-hdg-lv2" id="extra-1"><span class="m-hdg-lv2__inner"><span class="m-hdg-lv2__title">Merits </span> </span></h2>
<ul class="m-list">
<li class="m-list__item">A stable supply structure supported by a strong supply chain.</li>
<li class="m-list__item">Proven sales track record with semiconductor makers.</li>
<li class="m-list__item">High-quality technical support based on extensive marketing experience.</li>
</ul>
<h2 class="m-hdg-lv2" id="extra-2"><span class="m-hdg-lv2__inner"><span class="m-hdg-lv2__title">Characteristics</span> </span></h2>
<h3 class="m-hdg-lv3"><span class="m-hdg-lv3__inner"><span class="m-hdg-lv3__title">Technical Data</span></span></h3>
<div class="m-tbl-sp-break m-tbl-sp-break--not-break">
<table class="m-tbl-sp-break__tbl">
<colgroup>
<col class="w-15">
<col class="w-15">
<col class="w-40">
</colgroup>
<tbody>
<tr>
<td>Appearance / colorless gas or liquid</td>
<td>Odor / pungent odor</td>
</tr>
<tr>
<td>CAS NO / 7783-61-1</td>
<td>UN number / 1859</td>
</tr>
<tr>
<td>Incombustible, corrosive gas</td>
<td>Toxic</td>
</tr>
</tbody>
</table>
</div>
<ul class="m-list-note">
<li class="m-list-note__item"><span class="m-list-note__item-set"><span class="m-list-note__symbol">※</span> <span class="m-list-note__content">Please refer to the Product Safety Data Sheet&nbsp; (SDS) for the gas’s detailed properties and safety data.</span> </span></li>
</ul>
<h3 class="m-hdg-lv3"><span class="m-hdg-lv3__inner"><span class="m-hdg-lv3__title">Physical &amp; Chemical Properties of SiF<sub>4</sub></span></span></h3>
<div class="m-tbl-sp-break m-tbl-sp-break--not-break">
<table class="m-tbl-sp-break__tbl" style="width: 1025.33px;">
<colgroup>
<col class="w-15">
<col class="w-15">
<col class="w-40">
</colgroup>
<thead>
<tr>
<th style="width: 189px;">Item</th>
<th style="width: 509px;">Data</th>
</tr>
</thead>
<tbody>
<tr>
<td style="width: 189px;">Physical state</td>
<td style="width: 509px;">Gas</td>
</tr>
<tr>
<td style="width: 189px;">Appearance</td>
<td style="width: 509px;">Liquefied gas</td>
</tr>
<tr>
<td style="width: 189px;">Color</td>
<td style="width: 509px;">Colorless</td>
</tr>
<tr>
<td style="width: 189px;">Odor</td>
<td style="width: 509px;">Characteristic odor (pungent odor)</td>
</tr>
<tr>
<td style="width: 189px;">pH</td>
<td style="width: 509px;">Not applicable</td>
</tr>
<tr>
<td style="width: 189px;">Melting point</td>
<td style="width: 509px;">-95.7 ℃</td>
</tr>
<tr>
<td style="width: 189px;">Boiling point</td>
<td style="width: 509px;">-65℃ (0.2 MPa)</td>
</tr>
<tr>
<td style="width: 189px;">Flash point</td>
<td style="width: 509px;">Not applicable</td>
</tr>
<tr>
<td style="width: 189px;">Critical temperature</td>
<td style="width: 509px;">-14.20℃</td>
</tr>
<tr>
<td style="width: 189px;">Critical pressure</td>
<td style="width: 509px;">3.72 MPa</td>
</tr>
<tr>
<td style="width: 189px;">Relative vapor density (20℃)</td>
<td style="width: 509px;">4.67 g/L (-1℃)</td>
</tr>
<tr>
<td style="width: 189px;">Relative density</td>
<td style="width: 509px;">3.57 (air = 1, 15℃)</td>
</tr>
<tr>
<td style="width: 189px;">Density</td>
<td style="width: 509px;">4.67 g/l (-1℃)</td>
</tr>
</tbody>
</table>
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<title>High-Purity Hydrogen Fluoride (HF) | Semi Frontend Process High-Purity Gas, Abatement Systems/Surface Treatment, High-Purity Solvent, CMP Slurry, Anti...</title>
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<div class="m-lyt-media-index">
<div class="m-lyt-media-index__inner">
<div class="m-lyt-media-index__contents">
<p>Resonac’s high-purity gas used for etching insulating films in semiconductor manufacturing is particularly suitable for etching oxide films and chosen for etching natural oxide films on the surface of silicon.</p>
</div><!-- /.m-lyt-media-index__contents -->
<div class="m-lyt-media-index__img">
<img src="https://www.resonac.com/sites/default/files/2023-11/img-products-semifront-gas-hf.jpg" alt="フッ化水素(HF)" width="400" height="297" referrerpolicy="no-referrer">
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<h2 class="m-hdg-lv2" id="extra-1"><span class="m-hdg-lv2__inner"><span class="m-hdg-lv2__title">Merits </span> </span></h2>
<ul class="m-list">
<li class="m-list__item">A stable supply structure supported by a strong supply chain.</li>
<li class="m-list__item">Stable product quality with the technique for packaging corrosive gas.</li>
<li class="m-list__item">Proven sales track record with semiconductor makers.</li>
<li class="m-list__item">High-quality technical support based on extensive marketing experience.</li>
</ul>
<h2 class="m-hdg-lv2" id="extra-2"><span class="m-hdg-lv2__inner"><span class="m-hdg-lv2__title">Characteristics</span> </span></h2>
<h3 class="m-hdg-lv3"><span class="m-hdg-lv3__inner"><span class="m-hdg-lv3__title">Technical Data</span></span></h3>
<div class="m-tbl-sp-break m-tbl-sp-break--not-break">
<table class="m-tbl-sp-break__tbl">
<colgroup>
<col class="w-15">
<col class="w-15">
<col class="w-40">
</colgroup>
<tbody>
<tr>
<td>Appearance / colorless gas or liquid</td>
<td>Odor / pungent odor</td>
</tr>
<tr>
<td>CAS NO / 7664-39-3</td>
<td>UN number / 1052</td>
</tr>
<tr>
<td>Incombustible, corrosive gas</td>
<td>Toxic</td>
</tr>
</tbody>
</table>
</div>
<ul class="m-list-note">
<li class="m-list-note__item"><span class="m-list-note__item-set"><span class="m-list-note__symbol">※</span> <span class="m-list-note__content">Please refer to the Product Safety Data Sheet (SDS) for the gas’s detailed properties and safety data.</span> </span></li>
</ul>
<h3 class="m-hdg-lv3"><span class="m-hdg-lv3__inner"><span class="m-hdg-lv3__title">Physical &amp; Chemical Properties of HF</span></span></h3>
<div class="m-tbl-sp-break m-tbl-sp-break--not-break">
<table class="m-tbl-sp-break__tbl" style="width: 1025.33px;">
<colgroup>
<col class="w-15">
<col class="w-15">
<col class="w-40">
</colgroup>
<thead>
<tr>
<th style="width: 189px;">Item</th>
<th style="width: 509px;">Data</th>
</tr>
</thead>
<tbody>
<tr>
<td style="width: 189px;">Physical state</td>
<td style="width: 509px;">Liquid</td>
</tr>
<tr>
<td style="width: 189px;">Appearance</td>
<td style="width: 509px;">Liquid</td>
</tr>
<tr>
<td style="width: 189px;">Color</td>
<td style="width: 509px;">Colorless</td>
</tr>
<tr>
<td style="width: 189px;">Odor</td>
<td style="width: 509px;">Strong pungent odor</td>
</tr>
<tr>
<td style="width: 189px;">Odor threshold (ppm)</td>
<td style="width: 509px;">0.042ppm</td>
</tr>
<tr>
<td style="width: 189px;">pH</td>
<td style="width: 509px;">Strong acid (pH of the 2% solution is 1 or lower)</td>
</tr>
<tr>
<td style="width: 189px;">Melting point</td>
<td style="width: 509px;">-83.53 ℃</td>
</tr>
<tr>
<td style="width: 189px;">Boiling point</td>
<td style="width: 509px;">19.51 ℃</td>
</tr>
<tr>
<td style="width: 189px;">Vapor pressure</td>
<td style="width: 509px;">103.3 kPa (20℃)</td>
</tr>
<tr>
<td style="width: 189px;">Relative vapor density (20℃)</td>
<td style="width: 509px;">0.69 (air = 1, calculation value)</td>
</tr>
<tr>
<td style="width: 189px;">Relative density</td>
<td style="width: 509px;">0.987 (20℃)</td>
</tr>
</tbody>
</table>
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</description>
<link>https://www.resonac.com/products/semi-frontend-process/61/2024.html</link>
<guid isPermaLink="false">https://www.resonac.com/products/semi-frontend-process/61/2024.html</guid>
<pubDate>Sun, 29 Sep 2024 00:00:00 GMT</pubDate>
</item>
<item>
<title>High-Purity Sulfur Dioxide (SO2) | Semi Frontend Process High-Purity Gas, Abatement Systems/Surface Treatment, High-Purity Solvent, CMP Slurry, Anti-c...</title>
<description><div class="str-section__inner str-section__inner--large">
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</div>
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<div class="m-link-list-anchor">
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<li class="m-link-list-anchor__item"><a href="https://www.resonac.com/products/semi-frontend-process/61/2027.html#anc-01" class="m-link-list-anchor__link">About the product</a></li>
<li class="m-link-list-anchor__item"><a href="https://www.resonac.com/products/semi-frontend-process/61/2027.html#extra-1" class="m-link-list-anchor__link">Merits</a></li>
<li class="m-link-list-anchor__item"><a href="https://www.resonac.com/products/semi-frontend-process/61/2027.html#extra-2" class="m-link-list-anchor__link">Characteristics</a></li>
</ul><!-- /.m-link-list-anchor__list -->
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<h2 class="m-hdg-lv2">
<span class="m-hdg-lv2__title" id="anc-01">About the product</span>
</h2><!-- /.m-hdg-lv2 -->
<div class="m-lyt-media-index">
<div class="m-lyt-media-index__inner">
<div class="m-lyt-media-index__contents">
<p>Resonac’s high-purity gas used for etching insulating films in semiconductor manufacturing is particularly suitable for etching organic films and chosen for etching carbon masks.</p>
</div><!-- /.m-lyt-media-index__contents -->
<div class="m-lyt-media-index__img">
<img src="https://www.resonac.com/sites/default/files/2023-11/img-products-semifront-gas-so2.jpg" alt="亜硫酸ガス(SO2)" width="400" height="297" referrerpolicy="no-referrer">
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<h2 class="m-hdg-lv2" id="extra-1"><span class="m-hdg-lv2__inner"><span class="m-hdg-lv2__title">Merits</span> </span></h2>
<ul class="m-list">
<li class="m-list__item">A stable supply structure supported by a strong supply chain.</li>
<li class="m-list__item">Proven sales track record with semiconductor makers.</li>
<li class="m-list__item">High-quality technical support based on extensive marketing experience.</li>
<!-- /.m-tbl-sp-break -->
</ul>
<h2 class="m-hdg-lv2" id="extra-2"><span class="m-hdg-lv2__inner"><span class="m-hdg-lv2__title">Characteristics</span> </span></h2>
<h3 class="m-hdg-lv3"><span class="m-hdg-lv3__inner"><span class="m-hdg-lv3__title">Technical Data</span></span></h3>
<div class="m-tbl-sp-break m-tbl-sp-break--not-break">
<table class="m-tbl-sp-break__tbl">
<colgroup>
<col class="w-15">
<col class="w-15">
<col class="w-40">
</colgroup>
<tbody>
<tr>
<td>Appearance / colorless gas</td>
<td>Odor / pungent odor</td>
</tr>
<tr>
<td>CAS NO / 7446-09-5</td>
<td>UN number / 1079</td>
</tr>
<tr>
<td>High-pressure gas, liquefied gas</td>
<td>Toxic</td>
</tr>
</tbody>
</table>
</div>
<ul class="m-list-note">
<li class="m-list-note__item"><span class="m-list-note__item-set"><span class="m-list-note__symbol">※</span> <span class="m-list-note__content">Please refer to the Product Safety Data Sheet (SDS) for the gas’s detailed properties and safety data.</span> </span></li>
</ul>
<!-- /.m-tbl-sp-break -->
<h3 class="m-hdg-lv3"><span class="m-hdg-lv3__inner"><span class="m-hdg-lv3__title">Physical &amp; Chemical Properties of SO<sub>2</sub></span></span></h3>
<div class="m-tbl-sp-break m-tbl-sp-break--not-break">
<table class="m-tbl-sp-break__tbl" style="width: 1457.85px;">
<colgroup>
<col class="w-15">
<col class="w-15">
<col class="w-40">
</colgroup>
<thead>
<tr>
<th style="width: 189px;">Item</th>
<th style="width: 364.069px;">Data</th>
</tr>
</thead>
<tbody>
<tr>
<td style="width: 189px;">Physical state</td>
<td style="width: 364.069px;">Gas</td>
</tr>
<tr>
<td style="width: 189px;">Appearance</td>
<td style="width: 364.069px;">Liquefied gas</td>
</tr>
<tr>
<td style="width: 189px;">Color</td>
<td style="width: 364.069px;">Colorless</td>
</tr>
<tr>
<td style="width: 189px;">Odor</td>
<td style="width: 364.069px;">Pungent odor</td>
</tr>
<tr>
<td style="width: 189px;">Odor threshold (ppm)</td>
<td style="width: 364.069px;">0.3 – 3 ppm</td>
</tr>
<tr>
<td style="width: 189px;">pH</td>
<td style="width: 364.069px;">Not applicable</td>
</tr>
<tr>
<td style="width: 189px;">Melting point</td>
<td style="width: 364.069px;">-75.5℃</td>
</tr>
<tr>
<td style="width: 189px;">Boiling point</td>
<td style="width: 364.069px;">-10.0℃</td>
</tr>
<tr>
<td style="width: 189px;">Flash point</td>
<td style="width: 364.069px;">Not applicable (incombustible)</td>
</tr>
<tr>
<td style="width: 189px;">Critical temperature</td>
<td style="width: 364.069px;">51.49 ℃</td>
</tr>
<tr>
<td style="width: 189px;">Autoignition point</td>
<td style="width: 364.069px;">Not applicable (incombustible)</td>
</tr>
<tr>
<td style="width: 189px;">Vapor pressure</td>
<td style="width: 364.069px;">330 kPa (20℃)</td>
</tr>
<tr>
<td style="width: 189px;">Relative density</td>
<td style="width: 364.069px;">Relative vapor density 2.2 (air = 1)</td>
</tr>
<tr>
<td style="width: 189px;">Density</td>
<td style="width: 364.069px;">Gas 2.927 kg/m<sup>3</sup> (0℃,101.3 kPa)&nbsp;<br>
Liquid 1.460 g/cm<sup>3</sup> (-10℃)</td>
</tr>
</tbody>
</table>
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</description>
<link>https://www.resonac.com/products/semi-frontend-process/61/2027.html</link>
<guid isPermaLink="false">https://www.resonac.com/products/semi-frontend-process/61/2027.html</guid>
<pubDate>Sun, 29 Sep 2024 00:00:00 GMT</pubDate>
</item>
<item>
<title>High-Purity Hydrogen Chloride (HCl) | Semi Frontend Process High-Purity Gas, Abatement Systems/Surface Treatment, High-Purity Solvent, CMP Slurry, Ant...</title>
<description><div class="str-section__inner str-section__inner--large">
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<div class="m-list-label-product__item-contents">
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</div>
</div><!-- /.m-list-label-product -->
<div class="m-link-list-anchor">
<ul class="m-link-list-anchor__list">
<li class="m-link-list-anchor__item"><a href="https://www.resonac.com/products/semi-frontend-process/61/2026.html#anc-01" class="m-link-list-anchor__link">About the product</a></li>
<li class="m-link-list-anchor__item"><a href="https://www.resonac.com/products/semi-frontend-process/61/2026.html#extra-1" class="m-link-list-anchor__link">Merits</a></li>
<li class="m-link-list-anchor__item"><a href="https://www.resonac.com/products/semi-frontend-process/61/2026.html#extra-2" class="m-link-list-anchor__link">Characteristics</a></li>
</ul><!-- /.m-link-list-anchor__list -->
</div><!-- /.m-link-list-anchor -->
<h2 class="m-hdg-lv2">
<span class="m-hdg-lv2__title" id="anc-01">About the product</span>
</h2><!-- /.m-hdg-lv2 -->
<div class="m-lyt-media-index">
<div class="m-lyt-media-index__inner">
<div class="m-lyt-media-index__contents">
<p>Resonac’s gas used for forming conductor film in semiconductor manufacturing is particularly suitable for the deposition of silicon films and chosen for forming silicon channel films as well as cleaning.</p>
</div><!-- /.m-lyt-media-index__contents -->
<div class="m-lyt-media-index__img">
<img src="https://www.resonac.com/sites/default/files/2023-11/img-products-semifront-gas-hcl.jpg" alt="塩化水素(HCl)" width="400" height="297" referrerpolicy="no-referrer">
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<h2 class="m-hdg-lv2" id="extra-1"><span class="m-hdg-lv2__inner"><span class="m-hdg-lv2__title">Merits</span> </span></h2>
<ul class="m-list">
<li class="m-list__item">A stable supply structure supported by a strong supply chain.</li>
<li class="m-list__item">Stable product quality with the technique for packaging corrosive gas.</li>
<li class="m-list__item">Proven sales track record with semiconductor makers.</li>
<li class="m-list__item">High-quality technical support based on extensive marketing experience.</li>
<!-- /.m-tbl-sp-break -->
</ul>
<h2 class="m-hdg-lv2" id="extra-2"><span class="m-hdg-lv2__inner"><span class="m-hdg-lv2__title">Characteristics</span> </span></h2>
<h3 class="m-hdg-lv3"><span class="m-hdg-lv3__inner"><span class="m-hdg-lv3__title">Technical Data</span></span></h3>
<div class="m-tbl-sp-break m-tbl-sp-break--not-break">
<table class="m-tbl-sp-break__tbl">
<colgroup>
<col class="w-15">
<col class="w-15">
<col class="w-40">
</colgroup>
<tbody>
<tr>
<td>Appearance / colorless gas or liquid</td>
<td>Odor / pungent odor</td>
</tr>
<tr>
<td>CAS NO / 7647-01-0</td>
<td>UN number / 1050</td>
</tr>
<tr>
<td>High-pressure gas, liquefied gas</td>
<td>Toxic, corrosive</td>
</tr>
</tbody>
</table>
</div>
<ul class="m-list-note">
<li class="m-list-note__item"><span class="m-list-note__item-set"><span class="m-list-note__symbol">※</span> <span class="m-list-note__content">Please refer to the Product Safety Data Sheet (SDS) for the gas’s detailed properties and safety data.</span> </span></li>
</ul>
<!-- /.m-tbl-sp-break -->
<h3 class="m-hdg-lv3"><span class="m-hdg-lv3__inner"><span class="m-hdg-lv3__title">Physical &amp; Chemical Properties of&nbsp;CH<sub>3</sub>F</span></span></h3>
<div class="m-tbl-sp-break m-tbl-sp-break--not-break">
<table class="m-tbl-sp-break__tbl" style="width: 1389.33px;">
<colgroup>
<col class="w-15">
<col class="w-15">
<col class="w-40">
</colgroup>
<thead>
<tr>
<th style="width: 189px;">Item</th>
<th style="width: 403px;">Data</th>
</tr>
</thead>
<tbody>
<tr>
<td style="width: 189px;">Physical state</td>
<td style="width: 403px;">Gas</td>
</tr>
<tr>
<td style="width: 189px;">Appearance</td>
<td style="width: 403px;">Liquefied gas</td>
</tr>
<tr>
<td style="width: 189px;">Color</td>
<td style="width: 403px;">Colorless</td>
</tr>
<tr>
<td style="width: 189px;">Odor</td>
<td style="width: 403px;">Pungent odor</td>
</tr>
<tr>
<td style="width: 189px;">pH</td>
<td style="width: 403px;">0.1 (1.0N)<br>
1.10 (0.1N)<br>
2.02 (0.01N)<br>
3.02 (0.001N)<br>
4.01 (0.0001N)</td>
</tr>
<tr>
<td style="width: 189px;">Melting point</td>
<td style="width: 403px;">-114.22℃</td>
</tr>
<tr>
<td style="width: 189px;">Boiling point</td>
<td style="width: 403px;">-85.05℃ (1013 hPa)</td>
</tr>
<tr>
<td style="width: 189px;">Flash point</td>
<td style="width: 403px;">Incombustible</td>
</tr>
<tr>
<td style="width: 189px;">Critical temperature</td>
<td style="width: 403px;">51.49 ℃</td>
</tr>
<tr>
<td style="width: 189px;">Autoignition point</td>
<td style="width: 403px;">Incombustible</td>
</tr>
<tr>
<td style="width: 189px;">Vapor pressure</td>
<td style="width: 403px;">35424 mm Hg (25℃)</td>
</tr>
<tr>
<td style="width: 189px;">Critical pressure</td>
<td style="width: 403px;">81.6 atm</td>
</tr>
<tr>
<td style="width: 189px;">Relative density</td>
<td style="width: 403px;">1.268 (air = 1)</td>
</tr>
<tr>
<td style="width: 189px;">Density</td>
<td style="width: 403px;">1.639 g/cm³ (0℃)</td>
</tr>
<tr>
<td style="width: 189px;">Explosive limits (upper, lower) (g/m³)</td>
<td style="width: 403px;">Not applicable (incombustible)</td>
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<title>High-Purity HFC-41 (CH3F) | Semi Frontend Process High-Purity Gas, Abatement Systems/Surface Treatment, High-Purity Solvent, CMP Slurry, Anti-charging...</title>
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<p>Resonac’s high-purity gas used for etching insulating films in semiconductor manufacturing, and particularly suitable for etching nitride films.</p>
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<h2 class="m-hdg-lv2" id="extra-1"><span class="m-hdg-lv2__inner"><span class="m-hdg-lv2__title">Merits</span> </span></h2>
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<li class="m-list__item">Used for etching various types of nitride films.</li>
<li class="m-list__item">Boasts one of the industry’s largest production volumes and a stable supply structure supported by a strong supply chain from multiple production sites.</li>
<li class="m-list__item">Relatively low global warming potential among HFC gases (GWP value = 92).</li>
<li class="m-list__item">Proven sales track record with semiconductor makers.</li>
<li class="m-list__item">High-quality technical support based on extensive marketing experience.</li>
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</ul>
<h2 class="m-hdg-lv2" id="extra-2"><span class="m-hdg-lv2__inner"><span class="m-hdg-lv2__title">Characteristics</span> </span></h2>
<h3 class="m-hdg-lv3"><span class="m-hdg-lv3__inner"><span class="m-hdg-lv3__title">Technical Data</span></span></h3>
<div class="m-tbl-sp-break m-tbl-sp-break--not-break">
<table class="m-tbl-sp-break__tbl">
<colgroup>
<col class="w-15">
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<col class="w-40">
</colgroup>
<tbody>
<tr>
<td>Appearance / colorless gas</td>
<td>Odor / odorless</td>
</tr>
<tr>
<td>CAS NO / 593-53-3</td>
<td>UN number / 2454</td>
</tr>
<tr>
<td>High-pressure gas</td>
<td>Combustible</td>
</tr>
</tbody>
</table>
</div>
<ul class="m-list-note">
<li class="m-list-note__item"><span class="m-list-note__item-set"><span class="m-list-note__symbol">※</span> <span class="m-list-note__content">Please refer to the Product Safety Data Sheet (SDS) for the gas’s detailed properties and safety data.</span> </span></li>
</ul>
<!-- /.m-tbl-sp-break -->
<h3 class="m-hdg-lv3"><span class="m-hdg-lv3__inner"><span class="m-hdg-lv3__title">Physical &amp; Chemical Properties of&nbsp;CH<sub>3</sub>F</span></span></h3>
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<thead>
<tr>
<th style="width: 189px;">Item</th>
<th style="width: 403px;">Data</th>
</tr>
</thead>
<tbody>
<tr>
<td style="width: 189px;">Physical state</td>
<td style="width: 403px;">Gas</td>
</tr>
<tr>
<td style="width: 189px;">Appearance</td>
<td style="width: 403px;">Liquefied gas</td>
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<td style="width: 189px;">Color</td>
|
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<item>
<title>High-Purity 20% Fluorine/Nitrogen Mixture (F2/N2) | Semi Frontend Process High-Purity Gas, Abatement Systems/Surface Treatment, High-Purity Solvent, C...</title>
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<p>Resonac’s high-purity gas used for cleaning film deposition chambers in semiconductor manufacturing and chosen mainly for 12-inch CVD equipment.</p>
</div><!-- /.m-lyt-media-index__contents -->
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<img src="https://www.resonac.com/sites/default/files/2023-11/img-products-semifront-gas-fnmix.jpg" alt="20%フッ素窒素混合ガス(F2N2)" width="400" height="297" referrerpolicy="no-referrer">
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<h2 class="m-hdg-lv2" id="extra-1"><span class="m-hdg-lv2__inner"><span class="m-hdg-lv2__title">Merits</span> </span></h2>
<ul class="m-list">
<li class="m-list__item">A stable supply structure supported by a strong supply chain.</li>
<li class="m-list__item">Stable product quality with the technique for packaging corrosive gas.</li>
<li class="m-list__item">Relatively low global warming potential compared with other cleaning gases (GWP value = 0).</li>
<li class="m-list__item">Proven sales track record with semiconductor makers.</li>
<li class="m-list__item">High-quality technical support based on extensive marketing experience</li>
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</ul>
<h2 class="m-hdg-lv2" id="extra-2"><span class="m-hdg-lv2__inner"><span class="m-hdg-lv2__title">Characteristics</span> </span></h2>
<h3 class="m-hdg-lv3"><span class="m-hdg-lv3__inner"><span class="m-hdg-lv3__title">Technical Data</span></span></h3>
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<colgroup>
<col class="w-15">
<col class="w-15">
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<tbody>
<tr>
<td>Appearance / colorless or pale yellow gas</td>
<td>Odor / pungent odor</td>
</tr>
<tr>
<td>UN number / 3306</td>
<td>High-pressure gas, compressed gas, oxidized gas</td>
</tr>
<tr>
<td>Toxic</td>
<td>&nbsp;</td>
</tr>
</tbody>
</table>
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<ul class="m-list-note">
<li class="m-list-note__item"><span class="m-list-note__item-set"><span class="m-list-note__symbol">※</span> <span class="m-list-note__content">Please refer to the Product Safety Data Sheet (SDS) for the gas’s detailed properties and safety data.</span> </span></li>
</ul>
<!-- /.m-tbl-sp-break -->
<h3 class="m-hdg-lv3"><span class="m-hdg-lv3__inner"><span class="m-hdg-lv3__title">Physical &amp; Chemical Properties of F<sub>2</sub>/N<sub>2</sub></span></span></h3>
<div class="m-tbl-sp-break m-tbl-sp-break--not-break">
<table class="m-tbl-sp-break__tbl" style="width: 1389.33px;">
<colgroup>
<col class="w-15">
<col class="w-15">
<col class="w-40">
</colgroup>
<thead>
<tr>
<th style="width: 189px;">Item</th>
<th style="width: 403px;">Data</th>
</tr>
</thead>
<tbody>
<tr>
<td style="width: 189px;">Physical state</td>
<td style="width: 403px;">Gas</td>
</tr>
<tr>
<td style="width: 189px;">Appearance</td>
<td style="width: 403px;">Gas</td>
</tr>
<tr>
<td style="width: 189px;">Color</td>
<td style="width: 403px;">Colorless - pale yellow</td>
</tr>
<tr>
<td style="width: 189px;">Odor</td>
<td style="width: 403px;">Characteristic pungent odor</td>
</tr>
<tr>
<td style="width: 189px;">Melting point</td>
<td style="width: 403px;">Fluorine = -219.61℃ (0.209 kPa)<br>
Nitrogen = -209.86℃ (101.3 kPa)</td>
</tr>
<tr>
<td style="width: 189px;">Boiling point</td>
<td style="width: 403px;">Fluorine = -188.13℃ (101.3 kPa)<br>
Nitrogen = -195.82℃ (101.3 kPa)</td>
</tr>
<tr>
<td style="width: 189px;">Flash point</td>
<td style="width: 403px;">Not applicable since fluorine only enhances the combustion of other substances and nitrogen is incombustible.</td>
</tr>
<tr>
<td style="width: 189px;">Vapor pressure</td>
<td style="width: 403px;">Fluorine: C.P. -129.0℃, 5.57 MPa<br>
Nitrogen: C.P. -147.2℃, 3.394 MPa</td>
</tr>
<tr>
<td style="width: 189px;">Relative vapor density (20℃)</td>
<td style="width: 403px;">1.3392 (calculation value)<br>
Fluorine = 1.696 kg/m<sup>3</sup> (0 ℃, 101.3 kPa)<br>
Nitrogen = 1.2507 kg/m<sup>3</sup> (0℃, 101.3 kPa)</td>
</tr>
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<title>High-Purity Silicon Tetrafluoride (SiF4) | Semi Frontend Process High-Purity Gas, Abatement Systems/Surface Treatment, High-Purity Solvent, CMP Slurry...</title>
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<p>Resonac’s high-purity gas used for conductor etching in semiconductor manufacturing is chosen for various types of etching and forming SiOF or optical fibers.</p>
</div><!-- /.m-lyt-media-index__contents -->
<div class="m-lyt-media-index__img">
<img src="https://www.resonac.com/sites/default/files/2023-11/img-products-semifront-gas-sif4.jpg" alt="四フッ化ケイ素(SiF4)" width="400" height="297" referrerpolicy="no-referrer">
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<h2 class="m-hdg-lv2" id="extra-1"><span class="m-hdg-lv2__inner"><span class="m-hdg-lv2__title">Merits </span> </span></h2>
<ul class="m-list">
<li class="m-list__item">A stable supply structure supported by a strong supply chain.</li>
<li class="m-list__item">Proven sales track record with semiconductor makers.</li>
<li class="m-list__item">High-quality technical support based on extensive marketing experience.</li>
</ul>
<h2 class="m-hdg-lv2" id="extra-2"><span class="m-hdg-lv2__inner"><span class="m-hdg-lv2__title">Characteristics</span> </span></h2>
<h3 class="m-hdg-lv3"><span class="m-hdg-lv3__inner"><span class="m-hdg-lv3__title">Technical Data</span></span></h3>
<div class="m-tbl-sp-break m-tbl-sp-break--not-break">
<table class="m-tbl-sp-break__tbl">
<colgroup>
<col class="w-15">
<col class="w-15">
<col class="w-40">
</colgroup>
<tbody>
<tr>
<td>Appearance / colorless gas or liquid</td>
<td>Odor / pungent odor</td>
</tr>
<tr>
<td>CAS NO / 7783-61-1</td>
<td>UN number / 1859</td>
</tr>
<tr>
<td>Incombustible, corrosive gas</td>
<td>Toxic</td>
</tr>
</tbody>
</table>
</div>
<ul class="m-list-note">
<li class="m-list-note__item"><span class="m-list-note__item-set"><span class="m-list-note__symbol">※</span> <span class="m-list-note__content">Please refer to the Product Safety Data Sheet&nbsp; (SDS) for the gas’s detailed properties and safety data.</span> </span></li>
</ul>
<h3 class="m-hdg-lv3"><span class="m-hdg-lv3__inner"><span class="m-hdg-lv3__title">Physical &amp; Chemical Properties of SiF<sub>4</sub></span></span></h3>
<div class="m-tbl-sp-break m-tbl-sp-break--not-break">
<table class="m-tbl-sp-break__tbl" style="width: 1025.33px;">
<colgroup>
<col class="w-15">
<col class="w-15">
<col class="w-40">
</colgroup>
<thead>
<tr>
<th style="width: 189px;">Item</th>
<th style="width: 509px;">Data</th>
</tr>
</thead>
<tbody>
<tr>
<td style="width: 189px;">Physical state</td>
<td style="width: 509px;">Gas</td>
</tr>
<tr>
<td style="width: 189px;">Appearance</td>
<td style="width: 509px;">Liquefied gas</td>
</tr>
<tr>
<td style="width: 189px;">Color</td>
<td style="width: 509px;">Colorless</td>
</tr>
<tr>
<td style="width: 189px;">Odor</td>
<td style="width: 509px;">Characteristic odor (pungent odor)</td>
</tr>
<tr>
<td style="width: 189px;">pH</td>
<td style="width: 509px;">Not applicable</td>
</tr>
<tr>
<td style="width: 189px;">Melting point</td>
<td style="width: 509px;">-95.7 ℃</td>
</tr>
<tr>
<td style="width: 189px;">Boiling point</td>
<td style="width: 509px;">-65℃ (0.2 MPa)</td>
</tr>
<tr>
<td style="width: 189px;">Flash point</td>
<td style="width: 509px;">Not applicable</td>
</tr>
<tr>
<td style="width: 189px;">Critical temperature</td>
<td style="width: 509px;">-14.20℃</td>
</tr>
<tr>
<td style="width: 189px;">Critical pressure</td>
<td style="width: 509px;">3.72 MPa</td>
</tr>
<tr>
<td style="width: 189px;">Relative vapor density (20℃)</td>
<td style="width: 509px;">4.67 g/L (-1℃)</td>
</tr>
<tr>
<td style="width: 189px;">Relative density</td>
<td style="width: 509px;">3.57 (air = 1, 15℃)</td>
</tr>
<tr>
<td style="width: 189px;">Density</td>
<td style="width: 509px;">4.67 g/l (-1℃)</td>
</tr>
</tbody>
</table>
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<title>High-Purity Hydrogen Fluoride (HF) | Semi Frontend Process High-Purity Gas, Abatement Systems/Surface Treatment, High-Purity Solvent, CMP Slurry, Anti...</title>
<description><div class="str-section__inner str-section__inner--large">
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<li class="m-link-list-anchor__item"><a href="https://www.resonac.com/products/semi-frontend-process/61/2024.html#extra-1" class="m-link-list-anchor__link">Merits</a></li>
<li class="m-link-list-anchor__item"><a href="https://www.resonac.com/products/semi-frontend-process/61/2024.html#extra-2" class="m-link-list-anchor__link">Characteristics</a></li>
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<div class="m-lyt-media-index">
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<p>Resonac’s high-purity gas used for etching insulating films in semiconductor manufacturing is particularly suitable for etching oxide films and chosen for etching natural oxide films on the surface of silicon.</p>
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<div class="m-lyt-media-index__img">
<img src="https://www.resonac.com/sites/default/files/2023-11/img-products-semifront-gas-hf.jpg" alt="フッ化水素(HF)" width="400" height="297" referrerpolicy="no-referrer">
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<h2 class="m-hdg-lv2" id="extra-1"><span class="m-hdg-lv2__inner"><span class="m-hdg-lv2__title">Merits </span> </span></h2>
<ul class="m-list">
<li class="m-list__item">A stable supply structure supported by a strong supply chain.</li>
<li class="m-list__item">Stable product quality with the technique for packaging corrosive gas.</li>
<li class="m-list__item">Proven sales track record with semiconductor makers.</li>
<li class="m-list__item">High-quality technical support based on extensive marketing experience.</li>
</ul>
<h2 class="m-hdg-lv2" id="extra-2"><span class="m-hdg-lv2__inner"><span class="m-hdg-lv2__title">Characteristics</span> </span></h2>
<h3 class="m-hdg-lv3"><span class="m-hdg-lv3__inner"><span class="m-hdg-lv3__title">Technical Data</span></span></h3>
<div class="m-tbl-sp-break m-tbl-sp-break--not-break">
<table class="m-tbl-sp-break__tbl">
<colgroup>
<col class="w-15">
<col class="w-15">
<col class="w-40">
</colgroup>
<tbody>
<tr>
<td>Appearance / colorless gas or liquid</td>
<td>Odor / pungent odor</td>
</tr>
<tr>
<td>CAS NO / 7664-39-3</td>
<td>UN number / 1052</td>
</tr>
<tr>
<td>Incombustible, corrosive gas</td>
<td>Toxic</td>
</tr>
</tbody>
</table>
</div>
<ul class="m-list-note">
<li class="m-list-note__item"><span class="m-list-note__item-set"><span class="m-list-note__symbol">※</span> <span class="m-list-note__content">Please refer to the Product Safety Data Sheet (SDS) for the gas’s detailed properties and safety data.</span> </span></li>
</ul>
<h3 class="m-hdg-lv3"><span class="m-hdg-lv3__inner"><span class="m-hdg-lv3__title">Physical &amp; Chemical Properties of HF</span></span></h3>
<div class="m-tbl-sp-break m-tbl-sp-break--not-break">
<table class="m-tbl-sp-break__tbl" style="width: 1025.33px;">
<colgroup>
<col class="w-15">
<col class="w-15">
<col class="w-40">
</colgroup>
<thead>
<tr>
<th style="width: 189px;">Item</th>
<th style="width: 509px;">Data</th>
</tr>
</thead>
<tbody>
<tr>
<td style="width: 189px;">Physical state</td>
<td style="width: 509px;">Liquid</td>
</tr>
<tr>
<td style="width: 189px;">Appearance</td>
<td style="width: 509px;">Liquid</td>
</tr>
<tr>
<td style="width: 189px;">Color</td>
<td style="width: 509px;">Colorless</td>
</tr>
<tr>
<td style="width: 189px;">Odor</td>
<td style="width: 509px;">Strong pungent odor</td>
</tr>
<tr>
<td style="width: 189px;">Odor threshold (ppm)</td>
<td style="width: 509px;">0.042ppm</td>
</tr>
<tr>
<td style="width: 189px;">pH</td>
<td style="width: 509px;">Strong acid (pH of the 2% solution is 1 or lower)</td>
</tr>
<tr>
<td style="width: 189px;">Melting point</td>
<td style="width: 509px;">-83.53 ℃</td>
</tr>
<tr>
<td style="width: 189px;">Boiling point</td>
<td style="width: 509px;">19.51 ℃</td>
</tr>
<tr>
<td style="width: 189px;">Vapor pressure</td>
<td style="width: 509px;">103.3 kPa (20℃)</td>
</tr>
<tr>
<td style="width: 189px;">Relative vapor density (20℃)</td>
<td style="width: 509px;">0.69 (air = 1, calculation value)</td>
</tr>
<tr>
<td style="width: 189px;">Relative density</td>
<td style="width: 509px;">0.987 (20℃)</td>
</tr>
</tbody>
</table>
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<title>High-Purity Sulfur Dioxide (SO2) | Semi Frontend Process High-Purity Gas, Abatement Systems/Surface Treatment, High-Purity Solvent, CMP Slurry, Anti-c...</title>
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<div class="m-lyt-media-index">
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<p>Resonac’s high-purity gas used for etching insulating films in semiconductor manufacturing is particularly suitable for etching organic films and chosen for etching carbon masks.</p>
</div><!-- /.m-lyt-media-index__contents -->
<div class="m-lyt-media-index__img">
<img src="https://www.resonac.com/sites/default/files/2023-11/img-products-semifront-gas-so2.jpg" alt="亜硫酸ガス(SO2)" width="400" height="297" referrerpolicy="no-referrer">
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<h2 class="m-hdg-lv2" id="extra-1"><span class="m-hdg-lv2__inner"><span class="m-hdg-lv2__title">Merits</span> </span></h2>
<ul class="m-list">
<li class="m-list__item">A stable supply structure supported by a strong supply chain.</li>
<li class="m-list__item">Proven sales track record with semiconductor makers.</li>
<li class="m-list__item">High-quality technical support based on extensive marketing experience.</li>
<!-- /.m-tbl-sp-break -->
</ul>
<h2 class="m-hdg-lv2" id="extra-2"><span class="m-hdg-lv2__inner"><span class="m-hdg-lv2__title">Characteristics</span> </span></h2>
<h3 class="m-hdg-lv3"><span class="m-hdg-lv3__inner"><span class="m-hdg-lv3__title">Technical Data</span></span></h3>
<div class="m-tbl-sp-break m-tbl-sp-break--not-break">
<table class="m-tbl-sp-break__tbl">
<colgroup>
<col class="w-15">
<col class="w-15">
<col class="w-40">
</colgroup>
<tbody>
<tr>
<td>Appearance / colorless gas</td>
<td>Odor / pungent odor</td>
</tr>
<tr>
<td>CAS NO / 7446-09-5</td>
<td>UN number / 1079</td>
</tr>
<tr>
<td>High-pressure gas, liquefied gas</td>
<td>Toxic</td>
</tr>
</tbody>
</table>
</div>
<ul class="m-list-note">
<li class="m-list-note__item"><span class="m-list-note__item-set"><span class="m-list-note__symbol">※</span> <span class="m-list-note__content">Please refer to the Product Safety Data Sheet (SDS) for the gas’s detailed properties and safety data.</span> </span></li>
</ul>
<!-- /.m-tbl-sp-break -->
<h3 class="m-hdg-lv3"><span class="m-hdg-lv3__inner"><span class="m-hdg-lv3__title">Physical &amp; Chemical Properties of SO<sub>2</sub></span></span></h3>
<div class="m-tbl-sp-break m-tbl-sp-break--not-break">
<table class="m-tbl-sp-break__tbl" style="width: 1457.85px;">
<colgroup>
<col class="w-15">
<col class="w-15">
<col class="w-40">
</colgroup>
<thead>
<tr>
<th style="width: 189px;">Item</th>
<th style="width: 364.069px;">Data</th>
</tr>
</thead>
<tbody>
<tr>
<td style="width: 189px;">Physical state</td>
<td style="width: 364.069px;">Gas</td>
</tr>
<tr>
<td style="width: 189px;">Appearance</td>
<td style="width: 364.069px;">Liquefied gas</td>
</tr>
<tr>
<td style="width: 189px;">Color</td>
<td style="width: 364.069px;">Colorless</td>
</tr>
<tr>
<td style="width: 189px;">Odor</td>
<td style="width: 364.069px;">Pungent odor</td>
</tr>
<tr>
<td style="width: 189px;">Odor threshold (ppm)</td>
<td style="width: 364.069px;">0.3 – 3 ppm</td>
</tr>
<tr>
<td style="width: 189px;">pH</td>
<td style="width: 364.069px;">Not applicable</td>
</tr>
<tr>
<td style="width: 189px;">Melting point</td>
<td style="width: 364.069px;">-75.5℃</td>
</tr>
<tr>
<td style="width: 189px;">Boiling point</td>
<td style="width: 364.069px;">-10.0℃</td>
</tr>
<tr>
<td style="width: 189px;">Flash point</td>
<td style="width: 364.069px;">Not applicable (incombustible)</td>
</tr>
<tr>
<td style="width: 189px;">Critical temperature</td>
<td style="width: 364.069px;">51.49 ℃</td>
</tr>
<tr>
<td style="width: 189px;">Autoignition point</td>
<td style="width: 364.069px;">Not applicable (incombustible)</td>
</tr>
<tr>
<td style="width: 189px;">Vapor pressure</td>
<td style="width: 364.069px;">330 kPa (20℃)</td>
</tr>
<tr>
<td style="width: 189px;">Relative density</td>
<td style="width: 364.069px;">Relative vapor density 2.2 (air = 1)</td>
</tr>
<tr>
<td style="width: 189px;">Density</td>
<td style="width: 364.069px;">Gas 2.927 kg/m<sup>3</sup> (0℃,101.3 kPa)&nbsp;<br>
Liquid 1.460 g/cm<sup>3</sup> (-10℃)</td>
</tr>
</tbody>
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<title>High-Purity Hydrogen Chloride (HCl) | Semi Frontend Process High-Purity Gas, Abatement Systems/Surface Treatment, High-Purity Solvent, CMP Slurry, Ant...</title>
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<div class="m-lyt-media-index">
<div class="m-lyt-media-index__inner">
<div class="m-lyt-media-index__contents">
<p>Resonac’s gas used for forming conductor film in semiconductor manufacturing is particularly suitable for the deposition of silicon films and chosen for forming silicon channel films as well as cleaning.</p>
</div><!-- /.m-lyt-media-index__contents -->
<div class="m-lyt-media-index__img">
<img src="https://www.resonac.com/sites/default/files/2023-11/img-products-semifront-gas-hcl.jpg" alt="塩化水素(HCl)" width="400" height="297" referrerpolicy="no-referrer">
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<h2 class="m-hdg-lv2" id="extra-1"><span class="m-hdg-lv2__inner"><span class="m-hdg-lv2__title">Merits</span> </span></h2>
<ul class="m-list">
<li class="m-list__item">A stable supply structure supported by a strong supply chain.</li>
<li class="m-list__item">Stable product quality with the technique for packaging corrosive gas.</li>
<li class="m-list__item">Proven sales track record with semiconductor makers.</li>
<li class="m-list__item">High-quality technical support based on extensive marketing experience.</li>
<!-- /.m-tbl-sp-break -->
</ul>
<h2 class="m-hdg-lv2" id="extra-2"><span class="m-hdg-lv2__inner"><span class="m-hdg-lv2__title">Characteristics</span> </span></h2>
<h3 class="m-hdg-lv3"><span class="m-hdg-lv3__inner"><span class="m-hdg-lv3__title">Technical Data</span></span></h3>
<div class="m-tbl-sp-break m-tbl-sp-break--not-break">
<table class="m-tbl-sp-break__tbl">
<colgroup>
<col class="w-15">
<col class="w-15">
<col class="w-40">
</colgroup>
<tbody>
<tr>
<td>Appearance / colorless gas or liquid</td>
<td>Odor / pungent odor</td>
</tr>
<tr>
<td>CAS NO / 7647-01-0</td>
<td>UN number / 1050</td>
</tr>
<tr>
<td>High-pressure gas, liquefied gas</td>
<td>Toxic, corrosive</td>
</tr>
</tbody>
</table>
</div>
<ul class="m-list-note">
<li class="m-list-note__item"><span class="m-list-note__item-set"><span class="m-list-note__symbol">※</span> <span class="m-list-note__content">Please refer to the Product Safety Data Sheet (SDS) for the gas’s detailed properties and safety data.</span> </span></li>
</ul>
<!-- /.m-tbl-sp-break -->
<h3 class="m-hdg-lv3"><span class="m-hdg-lv3__inner"><span class="m-hdg-lv3__title">Physical &amp; Chemical Properties of&nbsp;CH<sub>3</sub>F</span></span></h3>
<div class="m-tbl-sp-break m-tbl-sp-break--not-break">
<table class="m-tbl-sp-break__tbl" style="width: 1389.33px;">
<colgroup>
<col class="w-15">
<col class="w-15">
<col class="w-40">
</colgroup>
<thead>
<tr>
<th style="width: 189px;">Item</th>
<th style="width: 403px;">Data</th>
</tr>
</thead>
<tbody>
<tr>
<td style="width: 189px;">Physical state</td>
<td style="width: 403px;">Gas</td>
</tr>
<tr>
<td style="width: 189px;">Appearance</td>
<td style="width: 403px;">Liquefied gas</td>
</tr>
<tr>
<td style="width: 189px;">Color</td>
<td style="width: 403px;">Colorless</td>
</tr>
<tr>
<td style="width: 189px;">Odor</td>
<td style="width: 403px;">Pungent odor</td>
</tr>
<tr>
<td style="width: 189px;">pH</td>
<td style="width: 403px;">0.1 (1.0N)<br>
1.10 (0.1N)<br>
2.02 (0.01N)<br>
3.02 (0.001N)<br>
4.01 (0.0001N)</td>
</tr>
<tr>
<td style="width: 189px;">Melting point</td>
<td style="width: 403px;">-114.22℃</td>
</tr>
<tr>
<td style="width: 189px;">Boiling point</td>
<td style="width: 403px;">-85.05℃ (1013 hPa)</td>
</tr>
<tr>
<td style="width: 189px;">Flash point</td>
<td style="width: 403px;">Incombustible</td>
</tr>
<tr>
<td style="width: 189px;">Critical temperature</td>
<td style="width: 403px;">51.49 ℃</td>
</tr>
<tr>
<td style="width: 189px;">Autoignition point</td>
<td style="width: 403px;">Incombustible</td>
</tr>
<tr>
<td style="width: 189px;">Vapor pressure</td>
<td style="width: 403px;">35424 mm Hg (25℃)</td>
</tr>
<tr>
<td style="width: 189px;">Critical pressure</td>
<td style="width: 403px;">81.6 atm</td>
</tr>
<tr>
<td style="width: 189px;">Relative density</td>
<td style="width: 403px;">1.268 (air = 1)</td>
</tr>
<tr>
<td style="width: 189px;">Density</td>
<td style="width: 403px;">1.639 g/cm³ (0℃)</td>
</tr>
<tr>
<td style="width: 189px;">Explosive limits (upper, lower) (g/m³)</td>
<td style="width: 403px;">Not applicable (incombustible)</td>
</tr>
</tbody>
</table>
</div>
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</description>
<link>https://www.resonac.com/products/semi-frontend-process/61/2026.html</link>
<guid isPermaLink="false">https://www.resonac.com/products/semi-frontend-process/61/2026.html</guid>
</item>
<item>
<title>High-Purity HFC-41 (CH3F) | Semi Frontend Process High-Purity Gas, Abatement Systems/Surface Treatment, High-Purity Solvent, CMP Slurry, Anti-charging...</title>
<description><div class="str-section__inner str-section__inner--large">
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<div class="m-list-label-product__item-contents">
</div><!-- /.m-list-label-product__item-contents -->
</div>
</div><!-- /.m-list-label-product -->
<div class="m-link-list-anchor">
<ul class="m-link-list-anchor__list">
<li class="m-link-list-anchor__item"><a href="https://www.resonac.com/products/semi-frontend-process/61/2017.html#anc-01" class="m-link-list-anchor__link">About the product</a></li>
<li class="m-link-list-anchor__item"><a href="https://www.resonac.com/products/semi-frontend-process/61/2017.html#extra-1" class="m-link-list-anchor__link">Merits</a></li>
<li class="m-link-list-anchor__item"><a href="https://www.resonac.com/products/semi-frontend-process/61/2017.html#extra-2" class="m-link-list-anchor__link">Characteristics</a></li>
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</div><!-- /.m-link-list-anchor -->
<h2 class="m-hdg-lv2">
<span class="m-hdg-lv2__title" id="anc-01">About the product</span>
</h2><!-- /.m-hdg-lv2 -->
<div class="m-lyt-media-index">
<div class="m-lyt-media-index__inner">
<div class="m-lyt-media-index__contents">
<p>Resonac’s high-purity gas used for etching insulating films in semiconductor manufacturing, and particularly suitable for etching nitride films.</p>
</div><!-- /.m-lyt-media-index__contents -->
<div class="m-lyt-media-index__img">
<img src="https://www.resonac.com/sites/default/files/2023-11/img-products-semifront-gas-hfc41.jpg" alt="HFC-41" width="400" height="297" referrerpolicy="no-referrer">
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<h2 class="m-hdg-lv2" id="extra-1"><span class="m-hdg-lv2__inner"><span class="m-hdg-lv2__title">Merits</span> </span></h2>
<ul class="m-list">
<li class="m-list__item">Used for etching various types of nitride films.</li>
<li class="m-list__item">Boasts one of the industry’s largest production volumes and a stable supply structure supported by a strong supply chain from multiple production sites.</li>
<li class="m-list__item">Relatively low global warming potential among HFC gases (GWP value = 92).</li>
<li class="m-list__item">Proven sales track record with semiconductor makers.</li>
<li class="m-list__item">High-quality technical support based on extensive marketing experience.</li>
<!-- /.m-tbl-sp-break -->
</ul>
<h2 class="m-hdg-lv2" id="extra-2"><span class="m-hdg-lv2__inner"><span class="m-hdg-lv2__title">Characteristics</span> </span></h2>
<h3 class="m-hdg-lv3"><span class="m-hdg-lv3__inner"><span class="m-hdg-lv3__title">Technical Data</span></span></h3>
<div class="m-tbl-sp-break m-tbl-sp-break--not-break">
<table class="m-tbl-sp-break__tbl">
<colgroup>
<col class="w-15">
<col class="w-15">
<col class="w-40">
</colgroup>
<tbody>
<tr>
<td>Appearance / colorless gas</td>
<td>Odor / odorless</td>
</tr>
<tr>
<td>CAS NO / 593-53-3</td>
<td>UN number / 2454</td>
</tr>
<tr>
<td>High-pressure gas</td>
<td>Combustible</td>
</tr>
</tbody>
</table>
</div>
<ul class="m-list-note">
<li class="m-list-note__item"><span class="m-list-note__item-set"><span class="m-list-note__symbol">※</span> <span class="m-list-note__content">Please refer to the Product Safety Data Sheet (SDS) for the gas’s detailed properties and safety data.</span> </span></li>
</ul>
<!-- /.m-tbl-sp-break -->
<h3 class="m-hdg-lv3"><span class="m-hdg-lv3__inner"><span class="m-hdg-lv3__title">Physical &amp; Chemical Properties of&nbsp;CH<sub>3</sub>F</span></span></h3>
<div class="m-tbl-sp-break m-tbl-sp-break--not-break">
<table class="m-tbl-sp-break__tbl" style="width: 1389.33px;">
<colgroup>
<col class="w-15">
<col class="w-15">
<col class="w-40">
</colgroup>
<thead>
<tr>
<th style="width: 189px;">Item</th>
<th style="width: 403px;">Data</th>
</tr>
</thead>
<tbody>
<tr>
<td style="width: 189px;">Physical state</td>
<td style="width: 403px;">Gas</td>
</tr>
<tr>
<td style="width: 189px;">Appearance</td>
<td style="width: 403px;">Liquefied gas</td>
</tr>
<tr>
<td style="width: 189px;">Color</td>
<td style="width: 403px;">Colorless</td>
</tr>
<tr>
<td style="width: 189px;">Odor</td>
<td style="width: 403px;">Ether odor</td>
</tr>
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