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FASENS: POLYTEC + GAIN-PHASE Messungen, Modenprofilaufnahme, Abgriff: optisch, Stahlträger geklebt. Si-Membran + ZnO-Schicht M7-2/3

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FASENS_Si-ZnO_M723

FASENS

POLYTEC (optische) + GAIN-PHASE (elektrische) Messungen
Modenprofilaufnahmen, Frequenzspektren

DUT

Abgriff: optisch, Stahlträger geklebt
Si-Membran + ZnO-Schicht M7-2/3

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FASENS: POLYTEC + GAIN-PHASE Messungen, Modenprofilaufnahme, Abgriff: optisch, Stahlträger geklebt. Si-Membran + ZnO-Schicht M7-2/3

experimental sensor frequency-analysis resonance silicon mems pressure-sensor zno bosch-sensor microsystems resonant-frequency zinkoxid

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